FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3147939065> ?p ?o ?g. }

• W3147939065 endingPage "512" @default.
• W3147939065 startingPage "509" @default.
• W3147939065 abstract "Various aluminum-doped zinc oxide(AZO) films were prepared on Si substrate by atomic layer deposition(ALD) at 100℃. The effect of the composition of AZO films on their electrical, optical characteristics,structural property and surface topography was investigated. The appearance of electrical resistivity shows their semiconducting properties. In most of the visible light band, all the AZO films present transparency of more than 80%. Al doping suppresses the AZO film crystallization.When the Al doping concentration increases up to 3.95 at%, the AZO film has some small multicrystal grains with random orientation. Al doping improves the roughness of i-ZnO film. The root mean square(RMS) roughness of samples prepared by ALD is much smaller than that prepared by radio-frequency magnetron sputtering reported." @default.
• W3147939065 created "2021-04-13" @default.
• W3147939065 creator A5002522499 @default.
• W3147939065 creator A5006982508 @default.
• W3147939065 creator A5010363081 @default.
• W3147939065 creator A5027461133 @default.
• W3147939065 creator A5031774992 @default.
• W3147939065 creator A5032245741 @default.
• W3147939065 creator A5032483419 @default.
• W3147939065 creator A5043958147 @default.
• W3147939065 creator A5057065866 @default.
• W3147939065 creator A5058932593 @default.
• W3147939065 creator A5070176688 @default.
• W3147939065 creator A5083320053 @default.
• W3147939065 creator A5089329858 @default.
• W3147939065 date "2016-01-01" @default.
• W3147939065 modified "2023-09-24" @default.
• W3147939065 title "Characteristics of atomic layer deposited transparent aluminum- doped zinc oxide thin films at low temperature" @default.
• W3147939065 hasPublicationYear "2016" @default.
• W3147939065 type Work @default.
• W3147939065 sameAs 3147939065 @default.
• W3147939065 citedByCount "0" @default.
• W3147939065 crossrefType "journal-article" @default.
• W3147939065 hasAuthorship W3147939065A5002522499 @default.
• W3147939065 hasAuthorship W3147939065A5006982508 @default.
• W3147939065 hasAuthorship W3147939065A5010363081 @default.
• W3147939065 hasAuthorship W3147939065A5027461133 @default.
• W3147939065 hasAuthorship W3147939065A5031774992 @default.
• W3147939065 hasAuthorship W3147939065A5032245741 @default.
• W3147939065 hasAuthorship W3147939065A5032483419 @default.
• W3147939065 hasAuthorship W3147939065A5043958147 @default.
• W3147939065 hasAuthorship W3147939065A5057065866 @default.
• W3147939065 hasAuthorship W3147939065A5058932593 @default.
• W3147939065 hasAuthorship W3147939065A5070176688 @default.
• W3147939065 hasAuthorship W3147939065A5083320053 @default.
• W3147939065 hasAuthorship W3147939065A5089329858 @default.
• W3147939065 hasConcept C107365816 @default.
• W3147939065 hasConcept C111368507 @default.
• W3147939065 hasConcept C119599485 @default.
• W3147939065 hasConcept C127313418 @default.
• W3147939065 hasConcept C127413603 @default.
• W3147939065 hasConcept C159985019 @default.
• W3147939065 hasConcept C171250308 @default.
• W3147939065 hasConcept C19067145 @default.
• W3147939065 hasConcept C191897082 @default.
• W3147939065 hasConcept C192562407 @default.
• W3147939065 hasConcept C203036418 @default.
• W3147939065 hasConcept C22423302 @default.
• W3147939065 hasConcept C2777289219 @default.
• W3147939065 hasConcept C2779227376 @default.
• W3147939065 hasConcept C42360764 @default.
• W3147939065 hasConcept C49040817 @default.
• W3147939065 hasConcept C513153333 @default.
• W3147939065 hasConcept C535196362 @default.
• W3147939065 hasConcept C57863236 @default.
• W3147939065 hasConcept C61427134 @default.
• W3147939065 hasConcept C69544855 @default.
• W3147939065 hasConcept C69990965 @default.
• W3147939065 hasConceptScore W3147939065C107365816 @default.
• W3147939065 hasConceptScore W3147939065C111368507 @default.
• W3147939065 hasConceptScore W3147939065C119599485 @default.
• W3147939065 hasConceptScore W3147939065C127313418 @default.
• W3147939065 hasConceptScore W3147939065C127413603 @default.
• W3147939065 hasConceptScore W3147939065C159985019 @default.
• W3147939065 hasConceptScore W3147939065C171250308 @default.
• W3147939065 hasConceptScore W3147939065C19067145 @default.
• W3147939065 hasConceptScore W3147939065C191897082 @default.
• W3147939065 hasConceptScore W3147939065C192562407 @default.
• W3147939065 hasConceptScore W3147939065C203036418 @default.
• W3147939065 hasConceptScore W3147939065C22423302 @default.
• W3147939065 hasConceptScore W3147939065C2777289219 @default.
• W3147939065 hasConceptScore W3147939065C2779227376 @default.
• W3147939065 hasConceptScore W3147939065C42360764 @default.
• W3147939065 hasConceptScore W3147939065C49040817 @default.
• W3147939065 hasConceptScore W3147939065C513153333 @default.
• W3147939065 hasConceptScore W3147939065C535196362 @default.
• W3147939065 hasConceptScore W3147939065C57863236 @default.
• W3147939065 hasConceptScore W3147939065C61427134 @default.
• W3147939065 hasConceptScore W3147939065C69544855 @default.
• W3147939065 hasConceptScore W3147939065C69990965 @default.
• W3147939065 hasIssue "7" @default.
• W3147939065 hasLocation W31479390651 @default.
• W3147939065 hasOpenAccess W3147939065 @default.
• W3147939065 hasPrimaryLocation W31479390651 @default.
• W3147939065 hasRelatedWork W1491681376 @default.
• W3147939065 hasRelatedWork W188667314 @default.
• W3147939065 hasRelatedWork W1893864704 @default.
• W3147939065 hasRelatedWork W2031635544 @default.
• W3147939065 hasRelatedWork W2241543892 @default.
• W3147939065 hasRelatedWork W2305509816 @default.
• W3147939065 hasRelatedWork W2364961664 @default.
• W3147939065 hasRelatedWork W2387241677 @default.
• W3147939065 hasRelatedWork W3140223528 @default.
• W3147939065 hasRelatedWork W3140569388 @default.
• W3147939065 hasRelatedWork W3141777123 @default.
• W3147939065 hasRelatedWork W3142504139 @default.
• W3147939065 hasRelatedWork W3144177360 @default.
• W3147939065 hasRelatedWork W3145859760 @default.

• next