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- W3148451856 abstract "Surface acoustic wave (SAW) sensors, based on piezoelectric effect, are used in many areas since decades. In 1885, Lord Rayleigh introduced the description of the SAW and predicted its properties. Rayleigh waves have longitudinal and vertical shear components that can couple with any media in contact with the surface. This coupling strongly affects the amplitude and velocity of the wave, allowing SAW sensors to directly sense mass and mechanical properties. Their technology is based on several piezoelectric substrate materials, depending of the application areas and the needed sensitivity: quartz (SiO2), lithium tantalate (LiTaO3), lithium niobate (LiNbO3), gallium arsenide (GaAs), silicon carbide (SiC), langasite (LGS), zinc oxide (ZnO), aluminum nitride (AlN), lead zirconium titanate (PZT), polyvinylidene fluoride (PVdF). Quartz substrate is the most common because the process used for manufacturing is wellknown, furthermore, choosing the cut angle and the wave propagation direction, allows to adapt the temperature dependence of the material and the nature of wave polarization for a specific application. Due to their simplicity, size, high resistance, high sensitivity, versatility, SAW sensors are integrated in a lot of devices in many areas of sensing: pressure [1], chemical [2], vapor [3], humidity [4], temperature [5], mass sensors [6], telecommunications [7], biosensors [8], rheology and seismology [9]. In this context we use SAW sensors based on guided shear horizontal surface acoustic waves (guided SH-SAW) or Love waves, predicted by A.E.H Love in 1911, for detection in liquid media thanks to their great surface sensitivity to mass loading effect and ability to work with adjacent liquid thanks to SH polarization. Recently, the advent of microfluidic systems, introduced by pioneer groups in this area, like The George Whitesides Research Group [10-12], revolutioned the biosensing world. Since it, the development of PDMS chips for microfluidics has known an extraordinary expansion. Nowadays, such devices offer a new approach in many areas, such as biology, ABSTRACT1" @default.
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- W3148451856 date "2010-01-01" @default.
- W3148451856 modified "2023-09-27" @default.
- W3148451856 title "PDMS (Polydimethylsiloxane) Microfluidic Chip Molding for Love Wave Biosensor" @default.
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