Matches in SemOpenAlex for { <https://semopenalex.org/work/W3149256494> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W3149256494 abstract "The introduction of electron beam(EB)brings features of both simultaneous observation of ion milling process and improvement of ion-milling accuracy in a dual beam system consisting of focused ion beam(FIB)and scanning electron microscope (SEM).The experiments reveal that simultaneous EB can also decrease the fabrication line width significantly during the ion milling process.Considering the Coulomb interaction between ions and electrons,the effect of simultaneous EB on the diameter of FIB in the course of milling was studied by numerical simulation.Both experiments and simulation indicate that the achievable fabrication line width can be dramatically reduced under appropriate conditions by introducing EB.It provides a convenient and effective way to improve the fabrication precision in the SEM-FIB dual beam system." @default.
- W3149256494 created "2021-04-13" @default.
- W3149256494 creator A5029685090 @default.
- W3149256494 date "2010-01-01" @default.
- W3149256494 modified "2023-09-24" @default.
- W3149256494 title "Improvement of fabrication precision of focused ion beam by introducing simultaneous electron beam" @default.
- W3149256494 hasPublicationYear "2010" @default.
- W3149256494 type Work @default.
- W3149256494 sameAs 3149256494 @default.
- W3149256494 citedByCount "0" @default.
- W3149256494 crossrefType "journal-article" @default.
- W3149256494 hasAuthorship W3149256494A5029685090 @default.
- W3149256494 hasConcept C109486029 @default.
- W3149256494 hasConcept C120665830 @default.
- W3149256494 hasConcept C121332964 @default.
- W3149256494 hasConcept C136525101 @default.
- W3149256494 hasConcept C142724271 @default.
- W3149256494 hasConcept C145148216 @default.
- W3149256494 hasConcept C147120987 @default.
- W3149256494 hasConcept C159985019 @default.
- W3149256494 hasConcept C161866238 @default.
- W3149256494 hasConcept C168834538 @default.
- W3149256494 hasConcept C171250308 @default.
- W3149256494 hasConcept C178790620 @default.
- W3149256494 hasConcept C185592680 @default.
- W3149256494 hasConcept C192562407 @default.
- W3149256494 hasConcept C193016168 @default.
- W3149256494 hasConcept C204787440 @default.
- W3149256494 hasConcept C26771246 @default.
- W3149256494 hasConcept C2779227376 @default.
- W3149256494 hasConcept C48736558 @default.
- W3149256494 hasConcept C49040817 @default.
- W3149256494 hasConcept C50774322 @default.
- W3149256494 hasConcept C62520636 @default.
- W3149256494 hasConcept C71924100 @default.
- W3149256494 hasConcept C95312477 @default.
- W3149256494 hasConceptScore W3149256494C109486029 @default.
- W3149256494 hasConceptScore W3149256494C120665830 @default.
- W3149256494 hasConceptScore W3149256494C121332964 @default.
- W3149256494 hasConceptScore W3149256494C136525101 @default.
- W3149256494 hasConceptScore W3149256494C142724271 @default.
- W3149256494 hasConceptScore W3149256494C145148216 @default.
- W3149256494 hasConceptScore W3149256494C147120987 @default.
- W3149256494 hasConceptScore W3149256494C159985019 @default.
- W3149256494 hasConceptScore W3149256494C161866238 @default.
- W3149256494 hasConceptScore W3149256494C168834538 @default.
- W3149256494 hasConceptScore W3149256494C171250308 @default.
- W3149256494 hasConceptScore W3149256494C178790620 @default.
- W3149256494 hasConceptScore W3149256494C185592680 @default.
- W3149256494 hasConceptScore W3149256494C192562407 @default.
- W3149256494 hasConceptScore W3149256494C193016168 @default.
- W3149256494 hasConceptScore W3149256494C204787440 @default.
- W3149256494 hasConceptScore W3149256494C26771246 @default.
- W3149256494 hasConceptScore W3149256494C2779227376 @default.
- W3149256494 hasConceptScore W3149256494C48736558 @default.
- W3149256494 hasConceptScore W3149256494C49040817 @default.
- W3149256494 hasConceptScore W3149256494C50774322 @default.
- W3149256494 hasConceptScore W3149256494C62520636 @default.
- W3149256494 hasConceptScore W3149256494C71924100 @default.
- W3149256494 hasConceptScore W3149256494C95312477 @default.
- W3149256494 hasLocation W31492564941 @default.
- W3149256494 hasOpenAccess W3149256494 @default.
- W3149256494 hasPrimaryLocation W31492564941 @default.
- W3149256494 hasRelatedWork W1587443902 @default.
- W3149256494 hasRelatedWork W1790652465 @default.
- W3149256494 hasRelatedWork W1967789404 @default.
- W3149256494 hasRelatedWork W1997059208 @default.
- W3149256494 hasRelatedWork W2000116780 @default.
- W3149256494 hasRelatedWork W2011915774 @default.
- W3149256494 hasRelatedWork W2036799251 @default.
- W3149256494 hasRelatedWork W2051957697 @default.
- W3149256494 hasRelatedWork W2060084003 @default.
- W3149256494 hasRelatedWork W2081326257 @default.
- W3149256494 hasRelatedWork W2088218027 @default.
- W3149256494 hasRelatedWork W2088879277 @default.
- W3149256494 hasRelatedWork W2103809632 @default.
- W3149256494 hasRelatedWork W2171856450 @default.
- W3149256494 hasRelatedWork W2327248689 @default.
- W3149256494 hasRelatedWork W2558616294 @default.
- W3149256494 hasRelatedWork W2560677390 @default.
- W3149256494 hasRelatedWork W2613972553 @default.
- W3149256494 hasRelatedWork W2990895165 @default.
- W3149256494 hasRelatedWork W2827981498 @default.
- W3149256494 isParatext "false" @default.
- W3149256494 isRetracted "false" @default.
- W3149256494 magId "3149256494" @default.
- W3149256494 workType "article" @default.