Matches in SemOpenAlex for { <https://semopenalex.org/work/W3149289705> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W3149289705 endingPage "70" @default.
- W3149289705 startingPage "69" @default.
- W3149289705 abstract "This paper concerns the design and fabrication of new transducer movers dedicated to 3D ultrasound sensors. Our MEMS-based movers were designed using CoventorWare finite element software to maximize the sector and rotation scan angles. These movers are fabricated on silicon wafers using the standard PolyMUMPs process. The design includes both a scanner actuated using four trapezium electrodes and a scanner actuated using vertical comb fingers. According to the simulation results, the required voltage to actuate this latter is significantly less than that required to actuate the platform using electrodes." @default.
- W3149289705 created "2021-04-13" @default.
- W3149289705 creator A5065458379 @default.
- W3149289705 creator A5082509767 @default.
- W3149289705 creator A5084091847 @default.
- W3149289705 date "2007-07-09" @default.
- W3149289705 modified "2023-09-23" @default.
- W3149289705 title "MEMS-Based Electrostatic Actuated Scanner Dedicated for Ultrasound Sensors" @default.
- W3149289705 cites W1969867149 @default.
- W3149289705 cites W1975214511 @default.
- W3149289705 cites W2085590180 @default.
- W3149289705 hasPublicationYear "2007" @default.
- W3149289705 type Work @default.
- W3149289705 sameAs 3149289705 @default.
- W3149289705 citedByCount "0" @default.
- W3149289705 crossrefType "proceedings-article" @default.
- W3149289705 hasAuthorship W3149289705A5065458379 @default.
- W3149289705 hasAuthorship W3149289705A5082509767 @default.
- W3149289705 hasAuthorship W3149289705A5084091847 @default.
- W3149289705 hasConcept C119599485 @default.
- W3149289705 hasConcept C121332964 @default.
- W3149289705 hasConcept C127413603 @default.
- W3149289705 hasConcept C135628077 @default.
- W3149289705 hasConcept C136525101 @default.
- W3149289705 hasConcept C142724271 @default.
- W3149289705 hasConcept C154945302 @default.
- W3149289705 hasConcept C160671074 @default.
- W3149289705 hasConcept C165801399 @default.
- W3149289705 hasConcept C192562407 @default.
- W3149289705 hasConcept C199360897 @default.
- W3149289705 hasConcept C204787440 @default.
- W3149289705 hasConcept C24326235 @default.
- W3149289705 hasConcept C24890656 @default.
- W3149289705 hasConcept C2777904410 @default.
- W3149289705 hasConcept C2779751349 @default.
- W3149289705 hasConcept C37977207 @default.
- W3149289705 hasConcept C41008148 @default.
- W3149289705 hasConcept C49040817 @default.
- W3149289705 hasConcept C56318395 @default.
- W3149289705 hasConcept C66938386 @default.
- W3149289705 hasConcept C71924100 @default.
- W3149289705 hasConcept C74050887 @default.
- W3149289705 hasConceptScore W3149289705C119599485 @default.
- W3149289705 hasConceptScore W3149289705C121332964 @default.
- W3149289705 hasConceptScore W3149289705C127413603 @default.
- W3149289705 hasConceptScore W3149289705C135628077 @default.
- W3149289705 hasConceptScore W3149289705C136525101 @default.
- W3149289705 hasConceptScore W3149289705C142724271 @default.
- W3149289705 hasConceptScore W3149289705C154945302 @default.
- W3149289705 hasConceptScore W3149289705C160671074 @default.
- W3149289705 hasConceptScore W3149289705C165801399 @default.
- W3149289705 hasConceptScore W3149289705C192562407 @default.
- W3149289705 hasConceptScore W3149289705C199360897 @default.
- W3149289705 hasConceptScore W3149289705C204787440 @default.
- W3149289705 hasConceptScore W3149289705C24326235 @default.
- W3149289705 hasConceptScore W3149289705C24890656 @default.
- W3149289705 hasConceptScore W3149289705C2777904410 @default.
- W3149289705 hasConceptScore W3149289705C2779751349 @default.
- W3149289705 hasConceptScore W3149289705C37977207 @default.
- W3149289705 hasConceptScore W3149289705C41008148 @default.
- W3149289705 hasConceptScore W3149289705C49040817 @default.
- W3149289705 hasConceptScore W3149289705C56318395 @default.
- W3149289705 hasConceptScore W3149289705C66938386 @default.
- W3149289705 hasConceptScore W3149289705C71924100 @default.
- W3149289705 hasConceptScore W3149289705C74050887 @default.
- W3149289705 hasLocation W31492897051 @default.
- W3149289705 hasOpenAccess W3149289705 @default.
- W3149289705 hasPrimaryLocation W31492897051 @default.
- W3149289705 hasRelatedWork W1864112663 @default.
- W3149289705 hasRelatedWork W1995902295 @default.
- W3149289705 hasRelatedWork W2022196226 @default.
- W3149289705 hasRelatedWork W2047980077 @default.
- W3149289705 hasRelatedWork W2081051139 @default.
- W3149289705 hasRelatedWork W2109620306 @default.
- W3149289705 hasRelatedWork W2116837493 @default.
- W3149289705 hasRelatedWork W2129333276 @default.
- W3149289705 hasRelatedWork W2132535794 @default.
- W3149289705 hasRelatedWork W2134405230 @default.
- W3149289705 hasRelatedWork W2144496827 @default.
- W3149289705 hasRelatedWork W2153503313 @default.
- W3149289705 hasRelatedWork W2155818572 @default.
- W3149289705 hasRelatedWork W2497336884 @default.
- W3149289705 hasRelatedWork W2536569977 @default.
- W3149289705 hasRelatedWork W2593824134 @default.
- W3149289705 hasRelatedWork W2823610131 @default.
- W3149289705 hasRelatedWork W3030845932 @default.
- W3149289705 hasRelatedWork W2814776066 @default.
- W3149289705 hasRelatedWork W3019256298 @default.
- W3149289705 isParatext "false" @default.
- W3149289705 isRetracted "false" @default.
- W3149289705 magId "3149289705" @default.
- W3149289705 workType "article" @default.