Matches in SemOpenAlex for { <https://semopenalex.org/work/W3149388434> ?p ?o ?g. }
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- W3149388434 endingPage "103" @default.
- W3149388434 startingPage "98" @default.
- W3149388434 abstract "AlN 电影被在各种各样的底部电极上劈啪作响的反应收音机频率 RF 扔，例如艾尔， Ti，瞬间， Au/Ti，和 Pt/Ti。AlN 薄电影的取向上的底层金属的效果被调查。X 光检查衍射，原子力量显微镜学，和地排放扫描电子显微镜学的结果证明 AlN 电影的取向显然取决于底层金属的类型。在各种各样的金属电极上扔的 AlN 电影的差别在在 AlN 材料和底层金属之间的格子失配和热扩大系数被归因于差别。在 Pt/Ti 电极上扔的 AlN 电影高度与井粗糙的圆柱的结构揭示 c 轴取向。在完成高质量的 AlN 电影和高效的电影体积的 Pt/Ti 电极的积极角色声学的共鸣器 FBAR 可以被归因于更小的格子失配以及在扔的 AlN 材料和 Pt/Ti 电极底层之间的热扩大系数的类似。" @default.
- W3149388434 created "2021-04-13" @default.
- W3149388434 creator A5003604634 @default.
- W3149388434 creator A5004026365 @default.
- W3149388434 creator A5043747588 @default.
- W3149388434 creator A5045602356 @default.
- W3149388434 creator A5052500563 @default.
- W3149388434 creator A5058824666 @default.
- W3149388434 creator A5070211662 @default.
- W3149388434 date "2010-01-01" @default.
- W3149388434 modified "2023-09-27" @default.
- W3149388434 title "Influence of substrate metals on the crystal growth of AIN films" @default.
- W3149388434 hasPublicationYear "2010" @default.
- W3149388434 type Work @default.
- W3149388434 sameAs 3149388434 @default.
- W3149388434 citedByCount "0" @default.
- W3149388434 crossrefType "journal-article" @default.
- W3149388434 hasAuthorship W3149388434A5003604634 @default.
- W3149388434 hasAuthorship W3149388434A5004026365 @default.
- W3149388434 hasAuthorship W3149388434A5043747588 @default.
- W3149388434 hasAuthorship W3149388434A5045602356 @default.
- W3149388434 hasAuthorship W3149388434A5052500563 @default.
- W3149388434 hasAuthorship W3149388434A5058824666 @default.
- W3149388434 hasAuthorship W3149388434A5070211662 @default.
- W3149388434 hasConcept C111368507 @default.
- W3149388434 hasConcept C127313418 @default.
- W3149388434 hasConcept C185592680 @default.
- W3149388434 hasConcept C191897082 @default.
- W3149388434 hasConcept C192562407 @default.
- W3149388434 hasConcept C2777289219 @default.
- W3149388434 hasConcept C49040817 @default.
- W3149388434 hasConcept C8010536 @default.
- W3149388434 hasConceptScore W3149388434C111368507 @default.
- W3149388434 hasConceptScore W3149388434C127313418 @default.
- W3149388434 hasConceptScore W3149388434C185592680 @default.
- W3149388434 hasConceptScore W3149388434C191897082 @default.
- W3149388434 hasConceptScore W3149388434C192562407 @default.
- W3149388434 hasConceptScore W3149388434C2777289219 @default.
- W3149388434 hasConceptScore W3149388434C49040817 @default.
- W3149388434 hasConceptScore W3149388434C8010536 @default.
- W3149388434 hasIssue "1" @default.
- W3149388434 hasLocation W31493884341 @default.
- W3149388434 hasOpenAccess W3149388434 @default.
- W3149388434 hasPrimaryLocation W31493884341 @default.
- W3149388434 hasRelatedWork W1146518989 @default.
- W3149388434 hasRelatedWork W2200089510 @default.
- W3149388434 hasRelatedWork W2258113158 @default.
- W3149388434 hasRelatedWork W2883552012 @default.
- W3149388434 hasRelatedWork W3140063525 @default.
- W3149388434 hasRelatedWork W3140832434 @default.
- W3149388434 hasRelatedWork W3141927134 @default.
- W3149388434 hasRelatedWork W3142676034 @default.
- W3149388434 hasRelatedWork W3143758421 @default.
- W3149388434 hasRelatedWork W3144104300 @default.
- W3149388434 hasRelatedWork W3144250263 @default.
- W3149388434 hasRelatedWork W3144456075 @default.
- W3149388434 hasRelatedWork W3145420265 @default.
- W3149388434 hasRelatedWork W3145810565 @default.
- W3149388434 hasRelatedWork W3146671800 @default.
- W3149388434 hasRelatedWork W3147085793 @default.
- W3149388434 hasRelatedWork W3148954617 @default.
- W3149388434 hasRelatedWork W3149493954 @default.
- W3149388434 hasRelatedWork W3149961085 @default.
- W3149388434 hasRelatedWork W3152133563 @default.
- W3149388434 hasVolume "17" @default.
- W3149388434 isParatext "false" @default.
- W3149388434 isRetracted "false" @default.
- W3149388434 magId "3149388434" @default.
- W3149388434 workType "article" @default.