Matches in SemOpenAlex for { <https://semopenalex.org/work/W3149450942> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W3149450942 endingPage "26" @default.
- W3149450942 startingPage "24" @default.
- W3149450942 abstract "为基于表面的干扰，电浆子挥动的 248 nm 的一种新影印石版术技术被使用计算机模拟建议并且示威。基本结构由表面电浆子电磁声子(SPP ) 组成干扰面具和多层的电影 superlens。用迅速凋落的波浪上的 superlens 的扩大效果，近的地 SPP 干扰模式被想象到远地，然后在相片上被暴露抵抗(PR ) 。模拟基于有限差别时间结果当从 248 nm 来源的 p 极化光是时，在干扰模式的半最大值(FWHM ) 的完整的宽度是大约 19 nm 的领域(FDTD ) 方法表演垂直地事件到结构。同时，焦点的深度为积极 PR 是为否定 PR 和 60 nm 的 150 nm，它在平常的 SPP 影印石版术比那大得多。" @default.
- W3149450942 created "2021-04-13" @default.
- W3149450942 creator A5018975083 @default.
- W3149450942 creator A5019292643 @default.
- W3149450942 creator A5026931951 @default.
- W3149450942 creator A5030403102 @default.
- W3149450942 creator A5048064490 @default.
- W3149450942 creator A5048508670 @default.
- W3149450942 creator A5062802153 @default.
- W3149450942 creator A5071782123 @default.
- W3149450942 creator A5072204401 @default.
- W3149450942 date "2014-01-01" @default.
- W3149450942 modified "2023-09-24" @default.
- W3149450942 title "248 nm imaging photolithography assisted by surface plasmon polariton interference" @default.
- W3149450942 hasPublicationYear "2014" @default.
- W3149450942 type Work @default.
- W3149450942 sameAs 3149450942 @default.
- W3149450942 citedByCount "0" @default.
- W3149450942 crossrefType "journal-article" @default.
- W3149450942 hasAuthorship W3149450942A5018975083 @default.
- W3149450942 hasAuthorship W3149450942A5019292643 @default.
- W3149450942 hasAuthorship W3149450942A5026931951 @default.
- W3149450942 hasAuthorship W3149450942A5030403102 @default.
- W3149450942 hasAuthorship W3149450942A5048064490 @default.
- W3149450942 hasAuthorship W3149450942A5048508670 @default.
- W3149450942 hasAuthorship W3149450942A5062802153 @default.
- W3149450942 hasAuthorship W3149450942A5071782123 @default.
- W3149450942 hasAuthorship W3149450942A5072204401 @default.
- W3149450942 hasConcept C105487726 @default.
- W3149450942 hasConcept C110879396 @default.
- W3149450942 hasConcept C120665830 @default.
- W3149450942 hasConcept C121332964 @default.
- W3149450942 hasConcept C136676167 @default.
- W3149450942 hasConcept C150835508 @default.
- W3149450942 hasConcept C184880428 @default.
- W3149450942 hasConcept C192562407 @default.
- W3149450942 hasConcept C49040817 @default.
- W3149450942 hasConcept C89953854 @default.
- W3149450942 hasConcept C94631461 @default.
- W3149450942 hasConceptScore W3149450942C105487726 @default.
- W3149450942 hasConceptScore W3149450942C110879396 @default.
- W3149450942 hasConceptScore W3149450942C120665830 @default.
- W3149450942 hasConceptScore W3149450942C121332964 @default.
- W3149450942 hasConceptScore W3149450942C136676167 @default.
- W3149450942 hasConceptScore W3149450942C150835508 @default.
- W3149450942 hasConceptScore W3149450942C184880428 @default.
- W3149450942 hasConceptScore W3149450942C192562407 @default.
- W3149450942 hasConceptScore W3149450942C49040817 @default.
- W3149450942 hasConceptScore W3149450942C89953854 @default.
- W3149450942 hasConceptScore W3149450942C94631461 @default.
- W3149450942 hasIssue "1" @default.
- W3149450942 hasLocation W31494509421 @default.
- W3149450942 hasOpenAccess W3149450942 @default.
- W3149450942 hasPrimaryLocation W31494509421 @default.
- W3149450942 hasRelatedWork W1977069432 @default.
- W3149450942 hasRelatedWork W1987963011 @default.
- W3149450942 hasRelatedWork W2026459371 @default.
- W3149450942 hasRelatedWork W2028296103 @default.
- W3149450942 hasRelatedWork W2031324139 @default.
- W3149450942 hasRelatedWork W2033075129 @default.
- W3149450942 hasRelatedWork W2039359784 @default.
- W3149450942 hasRelatedWork W2042122150 @default.
- W3149450942 hasRelatedWork W2061879596 @default.
- W3149450942 hasRelatedWork W2062702003 @default.
- W3149450942 hasRelatedWork W2122461885 @default.
- W3149450942 hasRelatedWork W2356858382 @default.
- W3149450942 hasRelatedWork W2568272678 @default.
- W3149450942 hasRelatedWork W2754878618 @default.
- W3149450942 hasRelatedWork W2774874740 @default.
- W3149450942 hasRelatedWork W2955892379 @default.
- W3149450942 hasRelatedWork W2983048574 @default.
- W3149450942 hasRelatedWork W3118558721 @default.
- W3149450942 hasRelatedWork W1969465837 @default.
- W3149450942 hasRelatedWork W3091828394 @default.
- W3149450942 isParatext "false" @default.
- W3149450942 isRetracted "false" @default.
- W3149450942 magId "3149450942" @default.
- W3149450942 workType "article" @default.