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- W3149544897 abstract "The low thermal conductivity of silicon nanostructures, with respect to bulk silicon, opens excellent possibilities for thermoelectric applications because it will enable the use of silicon for the high efficient direct conversion of wasted heat into electrical power. This paves the way for the application of silicon devices for energy scavenging and green energy harvesting. We present a device with a large number of nanostructures suspended on a silicon substrate. Top-down techniques for device fabrication based on advanced lithography and anisotropic etching will be discussed. FEM simulations were also carried out to analyze the temperature trend through the nanostructures." @default.
- W3149544897 created "2021-04-13" @default.
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- W3149544897 date "2021-03-26" @default.
- W3149544897 modified "2023-09-27" @default.
- W3149544897 title "On-chip all-silicon thermoelectric device" @default.
- W3149544897 hasPublicationYear "2021" @default.
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