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• W3149661485 abstract "Oxide semiconductor gas sensors are based on their change in resistance upon exposure to oxidizing or reducing gases. While gas sensors made of conventional particles and thin films of oxide semiconductors have been studied for these several tens of years, gas sensors made of nanowires have been studied for these ten years because they have possibility of indicating excellent gas sensing properties, owing to the discriminating structure of the nanowires. The high surface-to-volume ratio of the nanowires is expected to provide high sensitivity. The one dimensionally long shape of the nanowires may lead to favourable sensing properties. There are two types of nanowire sensor. One is made of nanowires dispersed on a substrate equipped with a pair of electrodes while the other is made of a single nanowire. In our study, the former type was investigated. We have first developed three types of evaporation method for forming oxide nanowires and then investigated their structure. The first one is a conventional vapour transport method. The second one is simple evaporation in ambient atmosphere. The last one is a method using a conventional vacuum evaporator with its chamber filled with prescribed pressure of oxidizing gas such as ambient air; we call this method a modified gas evaporation method. To clarify the feature of nanowire sensors, we have investigated the properties of the gas sensors made of nanowires. The effect of Pd doping was examined in the sensors made of SnO2 nanowires formed by the vapour transport method, and their performance was compared with sputtered film sensor. It is of great interest to investigate the effect of the thickness and length of the nanowires. The effect of the thickness was investigated for WO3 nanowires formed by the vapour transport method and SnO2 nanowires formed by the modified gas evaporation method, while the effect of the length was investigated for the SnO2 nanowires formed by the modified gas evaporation method in comparison with the gap lengths of electrodes. Gas sensors made of Ga2O3 and TeO2 nanowires, which have been rarely studied, were also investigated for exploring new nanowire sensor materials. In this article, the methods for forming nanowires are first explained, and then the structure of the nanowires and gas sensing properties are introduced." @default.
• W3149661485 created "2021-04-13" @default.
• W3149661485 creator A5070252743 @default.
• W3149661485 date "2014-01-01" @default.
• W3149661485 modified "2023-09-23" @default.
• W3149661485 title "Formation of Oxide Nanowires by Thermal Evaporation and Their Application to Gas Sensors" @default.
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