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- W3152495411 abstract "For the absolute measurement on 300-mm-aperture vertical Fizeau interferometer, the gravity-induced deformation of flats must be considered. In this paper, we proposed a three-flat method based on compensation of gravity-induced deformation. The large-aperture three-flat algorithm was derived. Then, the transient state changes of deformations were analyzed quantitatively by finite element method (FEM). The consistency of deformation between FEM and elastic theory was verified. Furthermore, to validate the proposed large-aperture three-flat method, we compared three-flat method and liquid reference method. Finally, the expanded uncertainty of three-flat method was deduced, which reached 1.47×10−2 λ (Peak Valley, PV) for a 300-mm aperture." @default.
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- W3152495411 date "2021-08-01" @default.
- W3152495411 modified "2023-09-26" @default.
- W3152495411 title "Absolute measurement for a 300-mm-aperture vertical interferometer based on compensation of gravity-induced deformation" @default.
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- W3152495411 doi "https://doi.org/10.1016/j.optcom.2021.127022" @default.
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