Matches in SemOpenAlex for { <https://semopenalex.org/work/W3154799911> ?p ?o ?g. }
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- W3154799911 endingPage "2423" @default.
- W3154799911 startingPage "2418" @default.
- W3154799911 abstract "The microstructure of thin polycrystalline films formed by molecular beam epitaxy (MBE) has been studied by transmission electron microscopy (TEM). Beneficial compressive residual stress was introduced by cavitation impacts. Surface morphology was characterized using atomic force microscopy (AFM). The films show two distinct microstructural regimes at the low and high end with an intermediate transition region. Homogeneous nucleation and growth in the bulk of the films were observed. Numerous planar twins are observed on the lower end while the polysilicon films has a highly textured columnar microstructure. The textured grains had rough edges. Both homogeneous nucleation and growth in the bulk of the films and heterogeneous nucleation and growth in the film-substrate interface are observed. The main defects have been identified as dislocations and microtwins. The locations of the dislocations are also discussed." @default.
- W3154799911 created "2021-04-26" @default.
- W3154799911 creator A5001136413 @default.
- W3154799911 creator A5023083349 @default.
- W3154799911 creator A5027022521 @default.
- W3154799911 date "2006-10-01" @default.
- W3154799911 modified "2023-09-25" @default.
- W3154799911 title "Characterization of polysilicon thin films for MEMS applications" @default.
- W3154799911 hasPublicationYear "2006" @default.
- W3154799911 type Work @default.
- W3154799911 sameAs 3154799911 @default.
- W3154799911 citedByCount "0" @default.
- W3154799911 crossrefType "journal-article" @default.
- W3154799911 hasAuthorship W3154799911A5001136413 @default.
- W3154799911 hasAuthorship W3154799911A5023083349 @default.
- W3154799911 hasAuthorship W3154799911A5027022521 @default.
- W3154799911 hasConcept C110738630 @default.
- W3154799911 hasConcept C111368507 @default.
- W3154799911 hasConcept C127313418 @default.
- W3154799911 hasConcept C137637335 @default.
- W3154799911 hasConcept C146088050 @default.
- W3154799911 hasConcept C159122135 @default.
- W3154799911 hasConcept C159985019 @default.
- W3154799911 hasConcept C171250308 @default.
- W3154799911 hasConcept C178790620 @default.
- W3154799911 hasConcept C185592680 @default.
- W3154799911 hasConcept C19067145 @default.
- W3154799911 hasConcept C191897082 @default.
- W3154799911 hasConcept C192562407 @default.
- W3154799911 hasConcept C2777289219 @default.
- W3154799911 hasConcept C2779227376 @default.
- W3154799911 hasConcept C2780841128 @default.
- W3154799911 hasConcept C37292000 @default.
- W3154799911 hasConcept C3792809 @default.
- W3154799911 hasConcept C61048295 @default.
- W3154799911 hasConcept C8010536 @default.
- W3154799911 hasConcept C87976508 @default.
- W3154799911 hasConceptScore W3154799911C110738630 @default.
- W3154799911 hasConceptScore W3154799911C111368507 @default.
- W3154799911 hasConceptScore W3154799911C127313418 @default.
- W3154799911 hasConceptScore W3154799911C137637335 @default.
- W3154799911 hasConceptScore W3154799911C146088050 @default.
- W3154799911 hasConceptScore W3154799911C159122135 @default.
- W3154799911 hasConceptScore W3154799911C159985019 @default.
- W3154799911 hasConceptScore W3154799911C171250308 @default.
- W3154799911 hasConceptScore W3154799911C178790620 @default.
- W3154799911 hasConceptScore W3154799911C185592680 @default.
- W3154799911 hasConceptScore W3154799911C19067145 @default.
- W3154799911 hasConceptScore W3154799911C191897082 @default.
- W3154799911 hasConceptScore W3154799911C192562407 @default.
- W3154799911 hasConceptScore W3154799911C2777289219 @default.
- W3154799911 hasConceptScore W3154799911C2779227376 @default.
- W3154799911 hasConceptScore W3154799911C2780841128 @default.
- W3154799911 hasConceptScore W3154799911C37292000 @default.
- W3154799911 hasConceptScore W3154799911C3792809 @default.
- W3154799911 hasConceptScore W3154799911C61048295 @default.
- W3154799911 hasConceptScore W3154799911C8010536 @default.
- W3154799911 hasConceptScore W3154799911C87976508 @default.
- W3154799911 hasIssue "10" @default.
- W3154799911 hasLocation W31547999111 @default.
- W3154799911 hasOpenAccess W3154799911 @default.
- W3154799911 hasPrimaryLocation W31547999111 @default.
- W3154799911 hasRelatedWork W1528623332 @default.
- W3154799911 hasRelatedWork W1968419591 @default.
- W3154799911 hasRelatedWork W1969418136 @default.
- W3154799911 hasRelatedWork W1985504818 @default.
- W3154799911 hasRelatedWork W2001901082 @default.
- W3154799911 hasRelatedWork W2005795605 @default.
- W3154799911 hasRelatedWork W2006172921 @default.
- W3154799911 hasRelatedWork W2012099846 @default.
- W3154799911 hasRelatedWork W2014428019 @default.
- W3154799911 hasRelatedWork W2016131919 @default.
- W3154799911 hasRelatedWork W2017566345 @default.
- W3154799911 hasRelatedWork W2028953464 @default.
- W3154799911 hasRelatedWork W2043543500 @default.
- W3154799911 hasRelatedWork W2047021889 @default.
- W3154799911 hasRelatedWork W2067951578 @default.
- W3154799911 hasRelatedWork W2079598812 @default.
- W3154799911 hasRelatedWork W2261325912 @default.
- W3154799911 hasRelatedWork W22857371 @default.
- W3154799911 hasRelatedWork W37400285 @default.
- W3154799911 hasRelatedWork W1643452203 @default.
- W3154799911 hasVolume "5" @default.
- W3154799911 isParatext "false" @default.
- W3154799911 isRetracted "false" @default.
- W3154799911 magId "3154799911" @default.
- W3154799911 workType "article" @default.