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- W3157936408 abstract "As advanced CMOS technology scaling goes beyond 7nm node, contact resistivity becomes an important factor influencing device performance. Approaches to reduce contact resistivity involve advanced doping techniques that yield very high degree of dopant activation at the semiconductor layers comprising the source and drain regions. These approaches include in-situ heavily doped epi layers and ion implantation followed by advanced annealing techniques. Irrespective of the approach used in wafer processing, accurate analysis of dopant activation within the top few nanometers of the surface is critical to understanding the effectiveness of such processes on improving contact resistivity. Similarly, correlation of mobility depth profile to defectivity in the layers helps one to understand how process variables may affect the ultimate electrical properties." @default.
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- W3157936408 date "2021-05-30" @default.
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- W3157936408 title "(Invited) Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)" @default.
- W3157936408 doi "https://doi.org/10.1149/ma2021-01301009mtgabs" @default.
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