FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3159644564> ?p ?o ?g. }

• W3159644564 abstract "We have examined the slow electron and hole trap density at TiN/Y <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> /SiGe MOS interfaces. The effect of trimethylaluminum (TMA) pre-treatment before Y <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> deposition on the slow trap density has been studied. Also, the dependency of the slow trap density on Ge contents of SiGe has been systematically evaluated and the influence of the composition of interfacial layers (ILs) is examined. It is found that 10-cycle TMA treatment is effective to suppress the formation of slow traps attributable to Ge-O bonds in ILs. On the other hand, the density of electron and hole slow traps in the Y <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> /SiGe MOS interfaces increases with higher Ge content of SiGe, which can be explained by the formation of vacancy-related defects due to incorporation of Ge-O bonds into SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> IL networks." @default.
• W3159644564 created "2021-05-10" @default.
• W3159644564 creator A5025650947 @default.
• W3159644564 creator A5042410367 @default.
• W3159644564 creator A5075853862 @default.
• W3159644564 creator A5086771285 @default.
• W3159644564 date "2021-03-01" @default.
• W3159644564 modified "2023-10-02" @default.
• W3159644564 title "Characterization of Slow Traps in SiGe MOS Interfaces by TiN/Y2O3 Gate Stacks" @default.
• W3159644564 cites W1966111651 @default.
• W3159644564 cites W1974675817 @default.
• W3159644564 cites W1978857324 @default.
• W3159644564 cites W2040782295 @default.
• W3159644564 cites W2056049645 @default.
• W3159644564 cites W2065885656 @default.
• W3159644564 cites W2137227326 @default.
• W3159644564 cites W2212829987 @default.
• W3159644564 cites W2336241111 @default.
• W3159644564 cites W2467799026 @default.
• W3159644564 cites W2478388453 @default.
• W3159644564 cites W2574629976 @default.
• W3159644564 cites W2913931866 @default.
• W3159644564 cites W2916387180 @default.
• W3159644564 cites W2943951558 @default.
• W3159644564 cites W2965903281 @default.
• W3159644564 cites W3006035525 @default.
• W3159644564 doi "https://doi.org/10.1109/irps46558.2021.9405189" @default.
• W3159644564 hasPublicationYear "2021" @default.
• W3159644564 type Work @default.
• W3159644564 sameAs 3159644564 @default.
• W3159644564 citedByCount "0" @default.
• W3159644564 crossrefType "proceedings-article" @default.
• W3159644564 hasAuthorship W3159644564A5025650947 @default.
• W3159644564 hasAuthorship W3159644564A5042410367 @default.
• W3159644564 hasAuthorship W3159644564A5075853862 @default.
• W3159644564 hasAuthorship W3159644564A5086771285 @default.
• W3159644564 hasConcept C121332964 @default.
• W3159644564 hasConcept C191897082 @default.
• W3159644564 hasConcept C192562407 @default.
• W3159644564 hasConcept C525849907 @default.
• W3159644564 hasConceptScore W3159644564C121332964 @default.
• W3159644564 hasConceptScore W3159644564C191897082 @default.
• W3159644564 hasConceptScore W3159644564C192562407 @default.
• W3159644564 hasConceptScore W3159644564C525849907 @default.
• W3159644564 hasFunder F4320320912 @default.
• W3159644564 hasLocation W31596445641 @default.
• W3159644564 hasOpenAccess W3159644564 @default.
• W3159644564 hasPrimaryLocation W31596445641 @default.
• W3159644564 hasRelatedWork W1937723476 @default.
• W3159644564 hasRelatedWork W1991793670 @default.
• W3159644564 hasRelatedWork W2042093121 @default.
• W3159644564 hasRelatedWork W2058827976 @default.
• W3159644564 hasRelatedWork W2061915335 @default.
• W3159644564 hasRelatedWork W2292872179 @default.
• W3159644564 hasRelatedWork W2363148876 @default.
• W3159644564 hasRelatedWork W2370242288 @default.
• W3159644564 hasRelatedWork W2883892660 @default.
• W3159644564 hasRelatedWork W3201544005 @default.
• W3159644564 isParatext "false" @default.
• W3159644564 isRetracted "false" @default.
• W3159644564 magId "3159644564" @default.
• W3159644564 workType "article" @default.