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- W3160321799 abstract "We present a comparative study of optical properties of aluminum nitride (AlN) thin films with different thicknesses. The films with thicknesses ranging from 66 to 303 nm were deposited by reactive sputtering and plasma enhanced atomic layer deposition (PEALD). Permittivity was extracted from an ellipsometry and Fourier-transform infrared (FTIR) spectroscopy reflection measurements. Our particular focus is on the influence of the deposition method and the film thickness on the AlN dielectric function. Here, we show that both PEALD-deposited and sputtered AlN films exhibit a monotonic dependence of negative permittivity on their thickness for vast mid-IR wavelengths including the reststrahlen band around 11.5–15 μm (∼870–667cm−1). By structural analysis, it was shown that PEALD-deposited layers contain a lower amount of oxygen and have smoother surfaces than deposited by the sputtering technique. On the other hand, sputtered films have higher densities and crystallinity, which results in the higher background permittivity (ε∞). In FTIR spectra of the PEALD-deposited layers, two specific features are observed, which can be explained by a higher concentration of nitrogen due to nitrogen-rich plasma in the ALD process. Such peculiarities of the optical properties of AlN films should be taken into account in potential applications of this material for metamaterials and nanostructured systems." @default.
- W3160321799 created "2021-05-24" @default.
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- W3160321799 date "2021-05-18" @default.
- W3160321799 modified "2023-10-04" @default.
- W3160321799 title "Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths" @default.
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- W3160321799 cites W1873158389 @default.
- W3160321799 cites W1968217464 @default.
- W3160321799 cites W1978703620 @default.
- W3160321799 cites W1983461897 @default.
- W3160321799 cites W1986919797 @default.
- W3160321799 cites W1990439074 @default.
- W3160321799 cites W1994647762 @default.
- W3160321799 cites W1996063780 @default.
- W3160321799 cites W2000182437 @default.
- W3160321799 cites W2002506515 @default.
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- W3160321799 cites W2017247816 @default.
- W3160321799 cites W2020786878 @default.
- W3160321799 cites W2025989435 @default.
- W3160321799 cites W2033670590 @default.
- W3160321799 cites W2043289735 @default.
- W3160321799 cites W2044696532 @default.
- W3160321799 cites W2048072678 @default.
- W3160321799 cites W2049240739 @default.
- W3160321799 cites W2054766631 @default.
- W3160321799 cites W2057049267 @default.
- W3160321799 cites W2059310165 @default.
- W3160321799 cites W2075477122 @default.
- W3160321799 cites W2076699264 @default.
- W3160321799 cites W2078593584 @default.
- W3160321799 cites W2090074128 @default.
- W3160321799 cites W2090476860 @default.
- W3160321799 cites W2092216181 @default.
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- W3160321799 cites W2127760034 @default.
- W3160321799 cites W2158932701 @default.
- W3160321799 cites W2165969279 @default.
- W3160321799 cites W2226773316 @default.
- W3160321799 cites W2296794309 @default.
- W3160321799 cites W2314139705 @default.
- W3160321799 cites W2340218746 @default.
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- W3160321799 cites W2470621256 @default.
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- W3160321799 cites W2749633938 @default.
- W3160321799 cites W2753102576 @default.
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- W3160321799 cites W2783413511 @default.
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- W3160321799 cites W2791806103 @default.
- W3160321799 cites W2794191366 @default.
- W3160321799 cites W2808411275 @default.
- W3160321799 cites W2809259083 @default.
- W3160321799 cites W2884739483 @default.
- W3160321799 cites W2885602979 @default.
- W3160321799 cites W2905146671 @default.
- W3160321799 cites W2921099761 @default.
- W3160321799 cites W2927692478 @default.
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- W3160321799 doi "https://doi.org/10.1116/6.0000884" @default.
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