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- W3163398276 abstract "In-situ optical emission spectroscopy (OES) is employed for PECVD chamber monitoring. OES is used as an addon sensor to monitoring and cleaning end point detection (EPD). On monitoring plasma chemistry using OES, the process gas and by-product gas are simultaneously monitored. Principal component analysis (PCA) enhances the capability of end point detection using OES data. Through chamber cleaning monitoring using OES, cleaning time is reduced by 53%, in general. Therefore, the gas usage of fluorine is also reduced, so satisfying Green Fab challenge in semiconductor manufacturing." @default.
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- W3163398276 date "2010-01-01" @default.
- W3163398276 modified "2023-09-27" @default.
- W3163398276 title "Regular Papers : PECVD Chamber Cleaning End Point Detection (EPD)Using Optical Emission Spectroscopy Data" @default.
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