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• W3163998052 endingPage "606" @default.
• W3163998052 startingPage "606" @default.
• W3163998052 abstract "Single-crystal 4H-SiC is a typical third-generation semiconductor power-device material because of its excellent electronic and thermal properties. A novel polishing technique that combines plasma electrolytic processing and mechanical polishing (PEP-MP) was proposed in order to polish single-crystal 4H-SiC surfaces effectively. In the PEP-MP process, the single-crystal 4H-SiC surface is modified into a soft oxide layer, which is mainly made of SiO2 and a small amount of silicon oxycarbide by plasma electrolytic processing. Then, the modified oxide layer is easily removed by soft abrasives such as CeO2, whose hardness is much lower than that of single-crystal 4H-SiC. Finally a scratch-free and damage-free surface can be obtained. The hardness of the single-crystal 4H-SiC surface is greatly decreased from 2891.03 to 72.61 HV after plasma electrolytic processing. By scanning electron microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS) observation, the plasma electrolytic processing behaviors of single-crystal 4H-SiC are investigated. The scanning white light interferometer (SWLI) images of 4H-SiC surface processed by PEP-MP for 30 s shows that an ultra-smooth surface is obtained and the surface roughness decreased from Sz 607 nm, Ra 64.5 nm to Sz 60.1 nm, Ra 8.1 nm and the material removal rate (MRR) of PEP-MP is about 21.8 μm/h." @default.
• W3163998052 created "2021-06-07" @default.
• W3163998052 creator A5015894529 @default.
• W3163998052 creator A5022365706 @default.
• W3163998052 creator A5039815736 @default.
• W3163998052 creator A5041540316 @default.
• W3163998052 creator A5048367128 @default.
• W3163998052 creator A5070153632 @default.
• W3163998052 date "2021-05-23" @default.
• W3163998052 modified "2023-10-16" @default.
• W3163998052 title "Combination of Plasma Electrolytic Processing and Mechanical Polishing for Single-Crystal 4H-SiC" @default.
• W3163998052 cites W1969666917 @default.
• W3163998052 cites W1989166122 @default.
• W3163998052 cites W1990167881 @default.
• W3163998052 cites W1990364914 @default.
• W3163998052 cites W2002260280 @default.
• W3163998052 cites W2011454047 @default.
• W3163998052 cites W2011541950 @default.
• W3163998052 cites W2027535188 @default.
• W3163998052 cites W2032695136 @default.
• W3163998052 cites W2038962735 @default.
• W3163998052 cites W2045830580 @default.
• W3163998052 cites W2046997109 @default.
• W3163998052 cites W2048652145 @default.
• W3163998052 cites W2051407751 @default.
• W3163998052 cites W2068941551 @default.
• W3163998052 cites W2073121655 @default.
• W3163998052 cites W2090860707 @default.
• W3163998052 cites W2162769213 @default.
• W3163998052 cites W2294765986 @default.
• W3163998052 cites W2515626398 @default.
• W3163998052 cites W2523261495 @default.
• W3163998052 cites W2588016627 @default.
• W3163998052 cites W2744563093 @default.
• W3163998052 cites W2765939052 @default.
• W3163998052 cites W2777736228 @default.
• W3163998052 cites W2791174063 @default.
• W3163998052 cites W2792203157 @default.
• W3163998052 cites W2887446060 @default.
• W3163998052 cites W2907421390 @default.
• W3163998052 cites W2909535811 @default.
• W3163998052 cites W2923201410 @default.
• W3163998052 cites W2942986009 @default.
• W3163998052 cites W2955635919 @default.
• W3163998052 cites W2999900426 @default.
• W3163998052 cites W3013385547 @default.
• W3163998052 cites W3087969441 @default.
• W3163998052 cites W3112507176 @default.
• W3163998052 doi "https://doi.org/10.3390/mi12060606" @default.
• W3163998052 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/8224618" @default.
• W3163998052 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/34071144" @default.
• W3163998052 hasPublicationYear "2021" @default.
• W3163998052 type Work @default.
• W3163998052 sameAs 3163998052 @default.
• W3163998052 citedByCount "4" @default.
• W3163998052 countsByYear W31639980522022 @default.
• W3163998052 countsByYear W31639980522023 @default.
• W3163998052 crossrefType "journal-article" @default.
• W3163998052 hasAuthorship W3163998052A5015894529 @default.
• W3163998052 hasAuthorship W3163998052A5022365706 @default.
• W3163998052 hasAuthorship W3163998052A5039815736 @default.
• W3163998052 hasAuthorship W3163998052A5041540316 @default.
• W3163998052 hasAuthorship W3163998052A5048367128 @default.
• W3163998052 hasAuthorship W3163998052A5070153632 @default.
• W3163998052 hasBestOaLocation W31639980521 @default.
• W3163998052 hasConcept C107365816 @default.
• W3163998052 hasConcept C113196181 @default.
• W3163998052 hasConcept C127413603 @default.
• W3163998052 hasConcept C138113353 @default.
• W3163998052 hasConcept C147789679 @default.
• W3163998052 hasConcept C159985019 @default.
• W3163998052 hasConcept C17525397 @default.
• W3163998052 hasConcept C175708663 @default.
• W3163998052 hasConcept C185592680 @default.
• W3163998052 hasConcept C191897082 @default.
• W3163998052 hasConcept C192562407 @default.
• W3163998052 hasConcept C199360897 @default.
• W3163998052 hasConcept C26771246 @default.
• W3163998052 hasConcept C2779851234 @default.
• W3163998052 hasConcept C2780722187 @default.
• W3163998052 hasConcept C2781285689 @default.
• W3163998052 hasConcept C41008148 @default.
• W3163998052 hasConcept C42360764 @default.
• W3163998052 hasConcept C43617362 @default.
• W3163998052 hasConcept C68801617 @default.
• W3163998052 hasConcept C73922627 @default.
• W3163998052 hasConcept C8010536 @default.
• W3163998052 hasConceptScore W3163998052C107365816 @default.
• W3163998052 hasConceptScore W3163998052C113196181 @default.
• W3163998052 hasConceptScore W3163998052C127413603 @default.
• W3163998052 hasConceptScore W3163998052C138113353 @default.
• W3163998052 hasConceptScore W3163998052C147789679 @default.
• W3163998052 hasConceptScore W3163998052C159985019 @default.
• W3163998052 hasConceptScore W3163998052C17525397 @default.
• W3163998052 hasConceptScore W3163998052C175708663 @default.
• W3163998052 hasConceptScore W3163998052C185592680 @default.
• W3163998052 hasConceptScore W3163998052C191897082 @default.
• W3163998052 hasConceptScore W3163998052C192562407 @default.

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