Matches in SemOpenAlex for { <https://semopenalex.org/work/W3168220688> ?p ?o ?g. }
- W3168220688 endingPage "29221" @default.
- W3168220688 startingPage "29212" @default.
- W3168220688 abstract "Hf1–xZrxO2 (HZO) is a complementary metal–oxide–semiconductor (CMOS)-compatible ferroelectric (FE) material with considerable potential for negative capacitance field-effect transistors, ferroelectric memory, and capacitors. At present, however, the deployment of HZO in CMOS integrated circuit (IC) technologies has stalled due to issues related to FE uniformity. Spatially mapping the FE distribution is one approach to facilitating the optimization of HZO thin films. This paper presents a novel technique based on synchrotron X-ray nanobeam absorption spectroscopy capable of mapping the three main phases of HZO (i.e., orthorhombic (O), tetragonal (T), and monoclinic (M)). The practical value of the proposed methodology when implemented in conjunction with kinetic-nucleation modeling is demonstrated by our development of a T → O annealing (TOA) process to optimize HZO films. This process produces an HZO film with the largest polarization values (Ps = 64.5 μC cm–2; Pr = 35.17 μC cm–2) so far, which can be attributed to M-phase suppression followed by low-temperature annealing for the induction of a T → O phase transition." @default.
- W3168220688 created "2021-06-22" @default.
- W3168220688 creator A5003934422 @default.
- W3168220688 creator A5006798468 @default.
- W3168220688 creator A5009393901 @default.
- W3168220688 creator A5021920527 @default.
- W3168220688 creator A5049486641 @default.
- W3168220688 creator A5052467280 @default.
- W3168220688 creator A5054945094 @default.
- W3168220688 creator A5058605789 @default.
- W3168220688 creator A5073417034 @default.
- W3168220688 creator A5074167382 @default.
- W3168220688 creator A5076416268 @default.
- W3168220688 date "2021-06-13" @default.
- W3168220688 modified "2023-10-16" @default.
- W3168220688 title "Visualizing Ferroelectric Uniformity of Hf<sub>1–<i>x</i></sub>Zr<i><sub>x</sub></i>O<sub>2</sub> Films Using X-ray Mapping" @default.
- W3168220688 cites W1853470600 @default.
- W3168220688 cites W1980978977 @default.
- W3168220688 cites W1995619771 @default.
- W3168220688 cites W2003634589 @default.
- W3168220688 cites W2007978852 @default.
- W3168220688 cites W2016106189 @default.
- W3168220688 cites W2017454700 @default.
- W3168220688 cites W2023413597 @default.
- W3168220688 cites W2038205520 @default.
- W3168220688 cites W2044719779 @default.
- W3168220688 cites W2068579447 @default.
- W3168220688 cites W2088991848 @default.
- W3168220688 cites W2094325813 @default.
- W3168220688 cites W2303243744 @default.
- W3168220688 cites W2332794823 @default.
- W3168220688 cites W2334220755 @default.
- W3168220688 cites W2345091875 @default.
- W3168220688 cites W2412580780 @default.
- W3168220688 cites W2606793363 @default.
- W3168220688 cites W2612563073 @default.
- W3168220688 cites W2625135835 @default.
- W3168220688 cites W2739937073 @default.
- W3168220688 cites W2744312841 @default.
- W3168220688 cites W2765526283 @default.
- W3168220688 cites W2770064890 @default.
- W3168220688 cites W2772225823 @default.
- W3168220688 cites W2776058350 @default.
- W3168220688 cites W2787076248 @default.
- W3168220688 cites W2787453651 @default.
- W3168220688 cites W2797641027 @default.
- W3168220688 cites W2805009678 @default.
- W3168220688 cites W2893995957 @default.
- W3168220688 cites W2900507180 @default.
- W3168220688 cites W2903916166 @default.
- W3168220688 cites W2904668006 @default.
- W3168220688 cites W2908553215 @default.
- W3168220688 cites W2934400062 @default.
- W3168220688 cites W2950288147 @default.
- W3168220688 cites W2972234587 @default.
- W3168220688 cites W2974838667 @default.
- W3168220688 cites W2988145228 @default.
- W3168220688 cites W2988886630 @default.
- W3168220688 cites W3012465862 @default.
- W3168220688 cites W3031938025 @default.
- W3168220688 cites W3092103149 @default.
- W3168220688 cites W3105213179 @default.
- W3168220688 cites W3122511478 @default.
- W3168220688 cites W3129987829 @default.
- W3168220688 doi "https://doi.org/10.1021/acsami.1c08265" @default.
- W3168220688 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/34121385" @default.
- W3168220688 hasPublicationYear "2021" @default.
- W3168220688 type Work @default.
- W3168220688 sameAs 3168220688 @default.
- W3168220688 citedByCount "12" @default.
- W3168220688 countsByYear W31682206882022 @default.
- W3168220688 countsByYear W31682206882023 @default.
- W3168220688 crossrefType "journal-article" @default.
- W3168220688 hasAuthorship W3168220688A5003934422 @default.
- W3168220688 hasAuthorship W3168220688A5006798468 @default.
- W3168220688 hasAuthorship W3168220688A5009393901 @default.
- W3168220688 hasAuthorship W3168220688A5021920527 @default.
- W3168220688 hasAuthorship W3168220688A5049486641 @default.
- W3168220688 hasAuthorship W3168220688A5052467280 @default.
- W3168220688 hasAuthorship W3168220688A5054945094 @default.
- W3168220688 hasAuthorship W3168220688A5058605789 @default.
- W3168220688 hasAuthorship W3168220688A5073417034 @default.
- W3168220688 hasAuthorship W3168220688A5074167382 @default.
- W3168220688 hasAuthorship W3168220688A5076416268 @default.
- W3168220688 hasConcept C113196181 @default.
- W3168220688 hasConcept C115624301 @default.
- W3168220688 hasConcept C119599485 @default.
- W3168220688 hasConcept C127413603 @default.
- W3168220688 hasConcept C133386390 @default.
- W3168220688 hasConcept C159985019 @default.
- W3168220688 hasConcept C165801399 @default.
- W3168220688 hasConcept C170751736 @default.
- W3168220688 hasConcept C178790620 @default.
- W3168220688 hasConcept C185592680 @default.
- W3168220688 hasConcept C192562407 @default.
- W3168220688 hasConcept C2777855556 @default.
- W3168220688 hasConcept C37243968 @default.
- W3168220688 hasConcept C43617362 @default.