Matches in SemOpenAlex for { <https://semopenalex.org/work/W3169505877> ?p ?o ?g. }
- W3169505877 endingPage "150285" @default.
- W3169505877 startingPage "150285" @default.
- W3169505877 abstract "Sputtered films of reduced molybdenum oxide (MoOx) with a molybdenum trioxide target in different pressures and atmospheres were deposited in varying temperatures. Compositional, optic, and electric characteristics of the samples were studied. X-ray photoelectron spectroscopy revealed reduced states when working in the hydrogen + argon atmosphere implying that stoichiometry could be controlled by adding some hydrogen in the sputtering chamber. The effect of slightly increasing the substrate temperature during deposition was also studied and lead to the presence of metastable Mo4+ states at 3 mTorr. Optical properties match the ones already in the literature, and transmittances of 90% were achieved. The results support sputtering as a viable method of depositing MoOx films apart from thermal evaporation for many applications." @default.
- W3169505877 created "2021-06-22" @default.
- W3169505877 creator A5006029598 @default.
- W3169505877 creator A5022104008 @default.
- W3169505877 creator A5047458980 @default.
- W3169505877 creator A5054764332 @default.
- W3169505877 creator A5055372752 @default.
- W3169505877 creator A5074730572 @default.
- W3169505877 creator A5087778202 @default.
- W3169505877 date "2021-10-01" @default.
- W3169505877 modified "2023-10-14" @default.
- W3169505877 title "Deposition and characterisation of sputtered molybdenum oxide thin films with hydrogen atmosphere" @default.
- W3169505877 cites W1506913370 @default.
- W3169505877 cites W1636480933 @default.
- W3169505877 cites W1876525337 @default.
- W3169505877 cites W1986292444 @default.
- W3169505877 cites W1987766131 @default.
- W3169505877 cites W1988764500 @default.
- W3169505877 cites W1990266611 @default.
- W3169505877 cites W1998615861 @default.
- W3169505877 cites W2008528409 @default.
- W3169505877 cites W2008582548 @default.
- W3169505877 cites W2014529866 @default.
- W3169505877 cites W2015494029 @default.
- W3169505877 cites W2025675725 @default.
- W3169505877 cites W2031861549 @default.
- W3169505877 cites W2036516468 @default.
- W3169505877 cites W2037514091 @default.
- W3169505877 cites W2038314423 @default.
- W3169505877 cites W2054816491 @default.
- W3169505877 cites W2057896037 @default.
- W3169505877 cites W2059988313 @default.
- W3169505877 cites W2072858607 @default.
- W3169505877 cites W2079695469 @default.
- W3169505877 cites W2081015588 @default.
- W3169505877 cites W2090348279 @default.
- W3169505877 cites W2093604241 @default.
- W3169505877 cites W2093792795 @default.
- W3169505877 cites W2094664541 @default.
- W3169505877 cites W2137751240 @default.
- W3169505877 cites W2166519846 @default.
- W3169505877 cites W2431602637 @default.
- W3169505877 cites W2469859909 @default.
- W3169505877 cites W2574316375 @default.
- W3169505877 cites W2596156772 @default.
- W3169505877 cites W2784537591 @default.
- W3169505877 cites W2945294645 @default.
- W3169505877 cites W2998641369 @default.
- W3169505877 cites W2999566371 @default.
- W3169505877 doi "https://doi.org/10.1016/j.apsusc.2021.150285" @default.
- W3169505877 hasPublicationYear "2021" @default.
- W3169505877 type Work @default.
- W3169505877 sameAs 3169505877 @default.
- W3169505877 citedByCount "11" @default.
- W3169505877 countsByYear W31695058772021 @default.
- W3169505877 countsByYear W31695058772022 @default.
- W3169505877 countsByYear W31695058772023 @default.
- W3169505877 crossrefType "journal-article" @default.
- W3169505877 hasAuthorship W3169505877A5006029598 @default.
- W3169505877 hasAuthorship W3169505877A5022104008 @default.
- W3169505877 hasAuthorship W3169505877A5047458980 @default.
- W3169505877 hasAuthorship W3169505877A5054764332 @default.
- W3169505877 hasAuthorship W3169505877A5055372752 @default.
- W3169505877 hasAuthorship W3169505877A5074730572 @default.
- W3169505877 hasAuthorship W3169505877A5087778202 @default.
- W3169505877 hasBestOaLocation W31695058771 @default.
- W3169505877 hasConcept C111368507 @default.
- W3169505877 hasConcept C113196181 @default.
- W3169505877 hasConcept C121332964 @default.
- W3169505877 hasConcept C127313418 @default.
- W3169505877 hasConcept C127413603 @default.
- W3169505877 hasConcept C151730666 @default.
- W3169505877 hasConcept C171250308 @default.
- W3169505877 hasConcept C175708663 @default.
- W3169505877 hasConcept C178790620 @default.
- W3169505877 hasConcept C185592680 @default.
- W3169505877 hasConcept C19067145 @default.
- W3169505877 hasConcept C191897082 @default.
- W3169505877 hasConcept C192562407 @default.
- W3169505877 hasConcept C22423302 @default.
- W3169505877 hasConcept C2777289219 @default.
- W3169505877 hasConcept C2779851234 @default.
- W3169505877 hasConcept C2780091738 @default.
- W3169505877 hasConcept C2816523 @default.
- W3169505877 hasConcept C42360764 @default.
- W3169505877 hasConcept C43617362 @default.
- W3169505877 hasConcept C512968161 @default.
- W3169505877 hasConcept C547737533 @default.
- W3169505877 hasConcept C549387045 @default.
- W3169505877 hasConcept C61427134 @default.
- W3169505877 hasConcept C61441594 @default.
- W3169505877 hasConcept C64297162 @default.
- W3169505877 hasConcept C86803240 @default.
- W3169505877 hasConcept C97355855 @default.
- W3169505877 hasConceptScore W3169505877C111368507 @default.
- W3169505877 hasConceptScore W3169505877C113196181 @default.
- W3169505877 hasConceptScore W3169505877C121332964 @default.
- W3169505877 hasConceptScore W3169505877C127313418 @default.