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- W3172564482 abstract "Abstract TiO 2 thin films were deposited by Spray Pyrolysis with thickness ((350±25) nm) onto glass substrates at (350°C), and the film was annealed at temperatures (400 and 500)°C. The structural and morphological properties of the thin films (TiO 2 ) were investigated by X-ray diffraction, Field emission scanning electron microscopy and atomic force microscope. The gas sensor fabricated by evaporating aluminum electrodes using the annealed TiO 2 thin films as an active material. The sensitivity of the sensors was determined by change the electrical resistance towards NO 2 at different working temperatures (200 and 300)°C. It was determined that the fabricated sensor using TiO 2 thin film annealed at (400) °C with 8.28 nm particle size has high sensitivity than the thin films annealed at 500°C with 10.37 nm particle size. The sensor operated at 200°C had also sensitive to the NO 2 gas and its sensivity increased with operated temperatures at 300°C. It was observed that the fabricated sensors exhibited reproducible and stable results." @default.
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- W3172564482 date "2021-05-01" @default.
- W3172564482 modified "2023-10-14" @default.
- W3172564482 title "Employment of Titanium dioxide thin film on NO2 gas sensing" @default.
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- W3172564482 doi "https://doi.org/10.1088/1742-6596/1879/3/032061" @default.
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