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- W3175280205 abstract "The inhibitor added into the slurry during copper/barrier chemical mechanical planarization (CMP) plays a vital role in controlling the dishing and erosion of the patterned wafer. In this paper, a kind of corrosion inhibitor TTA-K was introduced in H2O2 based alkaline slurry. The experimental results showed that the addition of TTA-K can effectively reduce the removal rate (RR) and static etch rate (SER) of Cu. The results revealed that with the increase of TTA-K concentration, the passivation effect was enhanced. The dishing and erosion test results showed that the TTA - K can effectively reduce the depth of dishing and erosion with different line widths and spaces. Electrochemistry, XPS and SEM measurement was implemented to characterize the mechanism of TTA-K passivation." @default.
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- W3175280205 date "2021-03-14" @default.
- W3175280205 modified "2023-09-24" @default.
- W3175280205 title "Effect of TTA-K as Inhibitor On CU/RU/TAN Structure based Patterned Wafer CMP" @default.
- W3175280205 doi "https://doi.org/10.1109/cstic52283.2021.9461442" @default.
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