Matches in SemOpenAlex for { <https://semopenalex.org/work/W3175804962> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W3175804962 abstract "This work presents a high- <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Q</i> capacitively transduced bulk acoustic wave (BAW) mode resonator which can be driven into vibrations with low bias voltages, distinguished from conventional BAW devices which are excited via tens of Volts. Comprehensive analysis was provided to have an insight into the transduction mechanism of the resonator. The structural design was optimized in terms of the enlarged transduction area and minimized energy dissipation. A simple and reliable silicon on insulator (SOI)-based fabrication process was exploited. The resonator with promising <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Q</i> values over 50000 can be driven with a low bias voltage of 2 V. Besides, the nonlinearity was also investigated for stable operation of the devices. The proposed resonator could have great potential applications in advanced monolithic RF front end transceivers." @default.
- W3175804962 created "2021-07-05" @default.
- W3175804962 creator A5020501607 @default.
- W3175804962 creator A5032287435 @default.
- W3175804962 creator A5041097208 @default.
- W3175804962 creator A5050756694 @default.
- W3175804962 creator A5069927821 @default.
- W3175804962 creator A5070014170 @default.
- W3175804962 creator A5072726373 @default.
- W3175804962 date "2021-04-25" @default.
- W3175804962 modified "2023-09-27" @default.
- W3175804962 title "A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages" @default.
- W3175804962 cites W1970862337 @default.
- W3175804962 cites W1973865983 @default.
- W3175804962 cites W1974003434 @default.
- W3175804962 cites W2013625638 @default.
- W3175804962 cites W2015799617 @default.
- W3175804962 cites W2017932821 @default.
- W3175804962 cites W2018806435 @default.
- W3175804962 cites W2056682993 @default.
- W3175804962 cites W2077045804 @default.
- W3175804962 cites W2089867942 @default.
- W3175804962 cites W2097296443 @default.
- W3175804962 cites W2097423366 @default.
- W3175804962 cites W2105093937 @default.
- W3175804962 cites W2106122013 @default.
- W3175804962 cites W2108062947 @default.
- W3175804962 cites W2134690061 @default.
- W3175804962 cites W2156065590 @default.
- W3175804962 cites W2511614264 @default.
- W3175804962 cites W3046071670 @default.
- W3175804962 cites W3084672746 @default.
- W3175804962 doi "https://doi.org/10.1109/nems51815.2021.9451294" @default.
- W3175804962 hasPublicationYear "2021" @default.
- W3175804962 type Work @default.
- W3175804962 sameAs 3175804962 @default.
- W3175804962 citedByCount "0" @default.
- W3175804962 crossrefType "proceedings-article" @default.
- W3175804962 hasAuthorship W3175804962A5020501607 @default.
- W3175804962 hasAuthorship W3175804962A5032287435 @default.
- W3175804962 hasAuthorship W3175804962A5041097208 @default.
- W3175804962 hasAuthorship W3175804962A5050756694 @default.
- W3175804962 hasAuthorship W3175804962A5069927821 @default.
- W3175804962 hasAuthorship W3175804962A5070014170 @default.
- W3175804962 hasAuthorship W3175804962A5072726373 @default.
- W3175804962 hasConcept C119599485 @default.
- W3175804962 hasConcept C121332964 @default.
- W3175804962 hasConcept C127413603 @default.
- W3175804962 hasConcept C135402231 @default.
- W3175804962 hasConcept C165801399 @default.
- W3175804962 hasConcept C192562407 @default.
- W3175804962 hasConcept C20254490 @default.
- W3175804962 hasConcept C24326235 @default.
- W3175804962 hasConcept C37977207 @default.
- W3175804962 hasConcept C46362747 @default.
- W3175804962 hasConcept C49040817 @default.
- W3175804962 hasConcept C53143962 @default.
- W3175804962 hasConcept C544956773 @default.
- W3175804962 hasConcept C7720470 @default.
- W3175804962 hasConcept C97126364 @default.
- W3175804962 hasConcept C97355855 @default.
- W3175804962 hasConceptScore W3175804962C119599485 @default.
- W3175804962 hasConceptScore W3175804962C121332964 @default.
- W3175804962 hasConceptScore W3175804962C127413603 @default.
- W3175804962 hasConceptScore W3175804962C135402231 @default.
- W3175804962 hasConceptScore W3175804962C165801399 @default.
- W3175804962 hasConceptScore W3175804962C192562407 @default.
- W3175804962 hasConceptScore W3175804962C20254490 @default.
- W3175804962 hasConceptScore W3175804962C24326235 @default.
- W3175804962 hasConceptScore W3175804962C37977207 @default.
- W3175804962 hasConceptScore W3175804962C46362747 @default.
- W3175804962 hasConceptScore W3175804962C49040817 @default.
- W3175804962 hasConceptScore W3175804962C53143962 @default.
- W3175804962 hasConceptScore W3175804962C544956773 @default.
- W3175804962 hasConceptScore W3175804962C7720470 @default.
- W3175804962 hasConceptScore W3175804962C97126364 @default.
- W3175804962 hasConceptScore W3175804962C97355855 @default.
- W3175804962 hasFunder F4320321001 @default.
- W3175804962 hasLocation W31758049621 @default.
- W3175804962 hasOpenAccess W3175804962 @default.
- W3175804962 hasPrimaryLocation W31758049621 @default.
- W3175804962 hasRelatedWork W1974971031 @default.
- W3175804962 hasRelatedWork W2004625185 @default.
- W3175804962 hasRelatedWork W2049978034 @default.
- W3175804962 hasRelatedWork W2093995018 @default.
- W3175804962 hasRelatedWork W2106134475 @default.
- W3175804962 hasRelatedWork W2238919743 @default.
- W3175804962 hasRelatedWork W2314107714 @default.
- W3175804962 hasRelatedWork W2510497165 @default.
- W3175804962 hasRelatedWork W2915099701 @default.
- W3175804962 hasRelatedWork W3175804962 @default.
- W3175804962 isParatext "false" @default.
- W3175804962 isRetracted "false" @default.
- W3175804962 magId "3175804962" @default.
- W3175804962 workType "article" @default.