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- W3176348059 abstract "In this paper, we present a new design of laterally-excited bulk wave resonators (XBARs) which contains narrow embedded interdigital electrodes (IDEs). The proposed XBAR has a high electromechanical coupling coefficient (K <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>eff</sub> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ) of 33.51 % and the smooth impedance curve. With the assistance of 149.5° Z-cut lithium niobate (LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> ) in XBARs, we obtain a high K <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>eff</sub> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> of 42.54%. We investigate the impact on K <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>eff</sub> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> and spurious modes of XBARs with different depths of electrodes Te). XBARs with the optimization of embedded electrodes show a great prospect in fabricating broad bandwidth filters." @default.
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- W3176348059 date "2021-04-25" @default.
- W3176348059 modified "2023-09-24" @default.
- W3176348059 title "Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in 149.5° Z-cut LiNbO3" @default.
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- W3176348059 doi "https://doi.org/10.1109/nems51815.2021.9451522" @default.
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