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• W3178718742 endingPage "822" @default.
• W3178718742 startingPage "822" @default.
• W3178718742 abstract "Practical experience in the use of high power impulse magnetron sputtering (HiPIMS) technology has revealed that output bias current depends on the total energy output of the cathodes, which means that bias voltage settings do not necessarily match the actual output. In this study, we investigated the effects of bias current and voltage on the characteristics of titanium nitride thin films produced using high impulse magnetron sputtering. The bias current and voltage values were adjusted by varying the supplied cathode power and substrate bias under DC and pulsed-DC output models. Our results revealed that pulse delay (PD) and feed forward (FF) settings can be used to control bias current and voltage. Increasing the bias current from 0.56 to 0.84 was shown to alter the preferred orientation from (111) to (220), increase the deposition rate, and lead to a corresponding increase in film thickness. The surface morphology of all titanium nitride samples exhibited tapered planes attributable to the low bias current and voltage (−30 V). The maximum hardness values were as follows: DC mode (23 GPa) and pulsed-DC mode (19 GPa). The lower hardness values of pulsed-DC samples can be attributed to residual stress, preferred orientation, and surface morphology. The surface of the samples was shown to be hydrophobic, with contact angles of >100°." @default.
• W3178718742 created "2021-07-19" @default.
• W3178718742 creator A5001048641 @default.
• W3178718742 creator A5033941528 @default.
• W3178718742 creator A5044545750 @default.
• W3178718742 creator A5075294914 @default.
• W3178718742 date "2021-07-07" @default.
• W3178718742 modified "2023-10-16" @default.
• W3178718742 title "The Effect of Match between High Power Impulse and Bias Voltage: TiN Coating Deposited by High Power Impulse Magnetron Sputtering" @default.
• W3178718742 cites W1968395683 @default.
• W3178718742 cites W1968723883 @default.
• W3178718742 cites W1970505734 @default.
• W3178718742 cites W1973234684 @default.
• W3178718742 cites W1976221564 @default.
• W3178718742 cites W1978824781 @default.
• W3178718742 cites W1981940392 @default.
• W3178718742 cites W1984122152 @default.
• W3178718742 cites W1985373656 @default.
• W3178718742 cites W1987135856 @default.
• W3178718742 cites W1993763866 @default.
• W3178718742 cites W2001489708 @default.
• W3178718742 cites W2013491076 @default.
• W3178718742 cites W2014413280 @default.
• W3178718742 cites W2034284324 @default.
• W3178718742 cites W2042937270 @default.
• W3178718742 cites W2051551635 @default.
• W3178718742 cites W2057385841 @default.
• W3178718742 cites W2066446859 @default.
• W3178718742 cites W2081483142 @default.
• W3178718742 cites W2083861234 @default.
• W3178718742 cites W2092968928 @default.
• W3178718742 cites W2094493253 @default.
• W3178718742 cites W2119368217 @default.
• W3178718742 cites W2146557039 @default.
• W3178718742 cites W2223608166 @default.
• W3178718742 cites W2604851991 @default.
• W3178718742 cites W2769729918 @default.
• W3178718742 cites W2793823526 @default.
• W3178718742 cites W2883332288 @default.
• W3178718742 cites W2911875969 @default.
• W3178718742 cites W2957329049 @default.
• W3178718742 cites W2970231718 @default.
• W3178718742 cites W2974746635 @default.
• W3178718742 cites W368084049 @default.
• W3178718742 doi "https://doi.org/10.3390/coatings11070822" @default.
• W3178718742 hasPublicationYear "2021" @default.
• W3178718742 type Work @default.
• W3178718742 sameAs 3178718742 @default.
• W3178718742 citedByCount "6" @default.
• W3178718742 countsByYear W31787187422022 @default.
• W3178718742 countsByYear W31787187422023 @default.
• W3178718742 crossrefType "journal-article" @default.
• W3178718742 hasAuthorship W3178718742A5001048641 @default.
• W3178718742 hasAuthorship W3178718742A5033941528 @default.
• W3178718742 hasAuthorship W3178718742A5044545750 @default.
• W3178718742 hasAuthorship W3178718742A5075294914 @default.
• W3178718742 hasBestOaLocation W31787187421 @default.
• W3178718742 hasConcept C119599485 @default.
• W3178718742 hasConcept C121332964 @default.
• W3178718742 hasConcept C123408415 @default.
• W3178718742 hasConcept C127413603 @default.
• W3178718742 hasConcept C159985019 @default.
• W3178718742 hasConcept C165801399 @default.
• W3178718742 hasConcept C171250308 @default.
• W3178718742 hasConcept C19067145 @default.
• W3178718742 hasConcept C192562407 @default.
• W3178718742 hasConcept C194760766 @default.
• W3178718742 hasConcept C20254490 @default.
• W3178718742 hasConcept C22423302 @default.
• W3178718742 hasConcept C2776620479 @default.
• W3178718742 hasConcept C2778489163 @default.
• W3178718742 hasConcept C2779227376 @default.
• W3178718742 hasConcept C2781083372 @default.
• W3178718742 hasConcept C2781448156 @default.
• W3178718742 hasConcept C49040817 @default.
• W3178718742 hasConcept C49110097 @default.
• W3178718742 hasConcept C61427134 @default.
• W3178718742 hasConcept C62520636 @default.
• W3178718742 hasConcept C70836080 @default.
• W3178718742 hasConcept C88682704 @default.
• W3178718742 hasConcept C97039730 @default.
• W3178718742 hasConcept C97892325 @default.
• W3178718742 hasConceptScore W3178718742C119599485 @default.
• W3178718742 hasConceptScore W3178718742C121332964 @default.
• W3178718742 hasConceptScore W3178718742C123408415 @default.
• W3178718742 hasConceptScore W3178718742C127413603 @default.
• W3178718742 hasConceptScore W3178718742C159985019 @default.
• W3178718742 hasConceptScore W3178718742C165801399 @default.
• W3178718742 hasConceptScore W3178718742C171250308 @default.
• W3178718742 hasConceptScore W3178718742C19067145 @default.
• W3178718742 hasConceptScore W3178718742C192562407 @default.
• W3178718742 hasConceptScore W3178718742C194760766 @default.
• W3178718742 hasConceptScore W3178718742C20254490 @default.
• W3178718742 hasConceptScore W3178718742C22423302 @default.
• W3178718742 hasConceptScore W3178718742C2776620479 @default.
• W3178718742 hasConceptScore W3178718742C2778489163 @default.
• W3178718742 hasConceptScore W3178718742C2779227376 @default.
• W3178718742 hasConceptScore W3178718742C2781083372 @default.

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