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- W3179082541 abstract "A real-time displacement sensor based on a laser diode interferometer that has a coaxial structure is proposed and demonstrated. Several measurements indicate measurement accuracy of 0.1 µm." @default.
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- W3179082541 date "2009-01-01" @default.
- W3179082541 modified "2023-09-24" @default.
- W3179082541 title "Real-time displacement measurement by use of a coaxial type of laser diode interferometer" @default.
- W3179082541 hasPublicationYear "2009" @default.
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