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- W3179657029 abstract "Abstract Functional thin films with a compositional gradient were deposited by a sputtering method with mixed powder targets. The composition ratio of nickel (Ni) and stainless steel (SUS304) was varied over the film thickness using several types of nickel oxide and stainless steel mixed powder targets. Our results indicate that mixed nickel-doped stainless-steel thin films were successfully prepared on both stainless-steel and Si substrates and the mixing ratio was controlled by the composition of the nickel oxide and stainless steel mixed powder." @default.
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- W3179657029 date "2021-12-15" @default.
- W3179657029 modified "2023-09-26" @default.
- W3179657029 title "Preparation of functional thin films with elemental gradient by sputtering with mixed powder targets" @default.
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- W3179657029 doi "https://doi.org/10.35848/1347-4065/ac1488" @default.
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