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- W3183165726 endingPage "13" @default.
- W3183165726 startingPage "10" @default.
- W3183165726 abstract "The usage of plasma as a reactant in atomic layer deposition processes started out as a niche process but in the meantime had its breakthrough in high-volume manufacturing in nano-electronics. Understanding the processes in plasma ALD is challenging but the knowledge in the Netherlands on plasma science, surface science and the ALD end-applications are a perfect foundation for a globally leading position in this field." @default.
- W3183165726 created "2021-08-02" @default.
- W3183165726 creator A5062788432 @default.
- W3183165726 date "2020-06-02" @default.
- W3183165726 modified "2023-09-27" @default.
- W3183165726 title "Plasma-assisted Atomic Layer Deposition : High-volume manufacturing and new opportunities in research" @default.
- W3183165726 hasPublicationYear "2020" @default.
- W3183165726 type Work @default.
- W3183165726 sameAs 3183165726 @default.
- W3183165726 citedByCount "0" @default.
- W3183165726 crossrefType "journal-article" @default.
- W3183165726 hasAuthorship W3183165726A5062788432 @default.
- W3183165726 hasConcept C121332964 @default.
- W3183165726 hasConcept C127313418 @default.
- W3183165726 hasConcept C127413603 @default.
- W3183165726 hasConcept C151730666 @default.
- W3183165726 hasConcept C171250308 @default.
- W3183165726 hasConcept C185544564 @default.
- W3183165726 hasConcept C192562407 @default.
- W3183165726 hasConcept C20556612 @default.
- W3183165726 hasConcept C2779227376 @default.
- W3183165726 hasConcept C2816523 @default.
- W3183165726 hasConcept C61696701 @default.
- W3183165726 hasConcept C62520636 @default.
- W3183165726 hasConcept C64297162 @default.
- W3183165726 hasConcept C69544855 @default.
- W3183165726 hasConcept C82706917 @default.
- W3183165726 hasConceptScore W3183165726C121332964 @default.
- W3183165726 hasConceptScore W3183165726C127313418 @default.
- W3183165726 hasConceptScore W3183165726C127413603 @default.
- W3183165726 hasConceptScore W3183165726C151730666 @default.
- W3183165726 hasConceptScore W3183165726C171250308 @default.
- W3183165726 hasConceptScore W3183165726C185544564 @default.
- W3183165726 hasConceptScore W3183165726C192562407 @default.
- W3183165726 hasConceptScore W3183165726C20556612 @default.
- W3183165726 hasConceptScore W3183165726C2779227376 @default.
- W3183165726 hasConceptScore W3183165726C2816523 @default.
- W3183165726 hasConceptScore W3183165726C61696701 @default.
- W3183165726 hasConceptScore W3183165726C62520636 @default.
- W3183165726 hasConceptScore W3183165726C64297162 @default.
- W3183165726 hasConceptScore W3183165726C69544855 @default.
- W3183165726 hasConceptScore W3183165726C82706917 @default.
- W3183165726 hasIssue "2" @default.
- W3183165726 hasLocation W31831657261 @default.
- W3183165726 hasOpenAccess W3183165726 @default.
- W3183165726 hasPrimaryLocation W31831657261 @default.
- W3183165726 hasRelatedWork W1483626592 @default.
- W3183165726 hasRelatedWork W151157740 @default.
- W3183165726 hasRelatedWork W1998534931 @default.
- W3183165726 hasRelatedWork W2010569326 @default.
- W3183165726 hasRelatedWork W2023603575 @default.
- W3183165726 hasRelatedWork W2041369327 @default.
- W3183165726 hasRelatedWork W2084426599 @default.
- W3183165726 hasRelatedWork W2113935288 @default.
- W3183165726 hasRelatedWork W2145578865 @default.
- W3183165726 hasRelatedWork W2351589479 @default.
- W3183165726 hasRelatedWork W2353752051 @default.
- W3183165726 hasRelatedWork W2438681326 @default.
- W3183165726 hasRelatedWork W2527995625 @default.
- W3183165726 hasRelatedWork W2563810937 @default.
- W3183165726 hasRelatedWork W2777539910 @default.
- W3183165726 hasRelatedWork W2895125475 @default.
- W3183165726 hasRelatedWork W2976672754 @default.
- W3183165726 hasRelatedWork W3135038428 @default.
- W3183165726 hasRelatedWork W3201317361 @default.
- W3183165726 hasRelatedWork W628877654 @default.
- W3183165726 hasVolume "58" @default.
- W3183165726 isParatext "false" @default.
- W3183165726 isRetracted "false" @default.
- W3183165726 magId "3183165726" @default.
- W3183165726 workType "article" @default.