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- W3183219570 abstract "In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics." @default.
- W3183219570 created "2021-08-02" @default.
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- W3183219570 date "2021-07-01" @default.
- W3183219570 modified "2023-10-17" @default.
- W3183219570 title "Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas" @default.
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- W3183219570 doi "https://doi.org/10.1063/5.0055444" @default.
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