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- W3183669900 endingPage "110502" @default.
- W3183669900 startingPage "110502" @default.
- W3183669900 abstract "The inertial electrostatic confinement (IEC) has been commonly researched in the scope of application for space propulsion and fusions reactors since many years. The utilization as thruster is possible due to a free emitting stream in a so-called jet mode of the IEC source. Depending on the setup, this jet can be operated as high energetic electron beam (tight jet) with electron energies of several keV or as low energetic plasma jet close to quasineutrality (spray jet). These modes are of high interest for thin film applications and plasma treatment. However, the IEC source is still not used in this field of application. Relevant application scopes can be electron substrate heating, surface plasma pretreatment, ionized physical vapor deposition and plasma enhanced chemical vapor deposition. In this paper, a cylindrical IEC source is presented that emits the plasma in both known jet modes, spray jet and tight jet. The jet emission occurs in radial outlet direction along the entire source height (“curtain-like” emission). Furthermore, an ignition test and operational behavior test is introduced. A stable spray jet operation region was examined and dependencies on pressure and voltage are investigated." @default.
- W3183669900 created "2021-08-02" @default.
- W3183669900 creator A5011519841 @default.
- W3183669900 creator A5032952197 @default.
- W3183669900 creator A5033615777 @default.
- W3183669900 creator A5036102015 @default.
- W3183669900 creator A5042547812 @default.
- W3183669900 creator A5073170526 @default.
- W3183669900 creator A5076565286 @default.
- W3183669900 date "2021-11-01" @default.
- W3183669900 modified "2023-10-17" @default.
- W3183669900 title "Cylindrical inertial electrostatic confinement plasma source for surface treatment" @default.
- W3183669900 cites W1035505829 @default.
- W3183669900 cites W178267905 @default.
- W3183669900 cites W1964662485 @default.
- W3183669900 cites W1991638608 @default.
- W3183669900 cites W2002287397 @default.
- W3183669900 cites W2002528553 @default.
- W3183669900 cites W2055218786 @default.
- W3183669900 cites W2063501066 @default.
- W3183669900 cites W2064046785 @default.
- W3183669900 cites W2069878697 @default.
- W3183669900 cites W2125952138 @default.
- W3183669900 cites W2130347327 @default.
- W3183669900 cites W2155838061 @default.
- W3183669900 cites W2161508873 @default.
- W3183669900 cites W2616265975 @default.
- W3183669900 cites W2887803967 @default.
- W3183669900 cites W2965929894 @default.
- W3183669900 cites W3014989195 @default.
- W3183669900 cites W2534250366 @default.
- W3183669900 doi "https://doi.org/10.1016/j.vacuum.2021.110502" @default.
- W3183669900 hasPublicationYear "2021" @default.
- W3183669900 type Work @default.
- W3183669900 sameAs 3183669900 @default.
- W3183669900 citedByCount "2" @default.
- W3183669900 countsByYear W31836699002021 @default.
- W3183669900 countsByYear W31836699002023 @default.
- W3183669900 crossrefType "journal-article" @default.
- W3183669900 hasAuthorship W3183669900A5011519841 @default.
- W3183669900 hasAuthorship W3183669900A5032952197 @default.
- W3183669900 hasAuthorship W3183669900A5033615777 @default.
- W3183669900 hasAuthorship W3183669900A5036102015 @default.
- W3183669900 hasAuthorship W3183669900A5042547812 @default.
- W3183669900 hasAuthorship W3183669900A5073170526 @default.
- W3183669900 hasAuthorship W3183669900A5076565286 @default.
- W3183669900 hasConcept C121332964 @default.
- W3183669900 hasConcept C173386949 @default.
- W3183669900 hasConcept C185544564 @default.
- W3183669900 hasConcept C192562407 @default.
- W3183669900 hasConcept C2524010 @default.
- W3183669900 hasConcept C2776799497 @default.
- W3183669900 hasConcept C2987720176 @default.
- W3183669900 hasConcept C33923547 @default.
- W3183669900 hasConcept C57879066 @default.
- W3183669900 hasConcept C74650414 @default.
- W3183669900 hasConcept C82706917 @default.
- W3183669900 hasConceptScore W3183669900C121332964 @default.
- W3183669900 hasConceptScore W3183669900C173386949 @default.
- W3183669900 hasConceptScore W3183669900C185544564 @default.
- W3183669900 hasConceptScore W3183669900C192562407 @default.
- W3183669900 hasConceptScore W3183669900C2524010 @default.
- W3183669900 hasConceptScore W3183669900C2776799497 @default.
- W3183669900 hasConceptScore W3183669900C2987720176 @default.
- W3183669900 hasConceptScore W3183669900C33923547 @default.
- W3183669900 hasConceptScore W3183669900C57879066 @default.
- W3183669900 hasConceptScore W3183669900C74650414 @default.
- W3183669900 hasConceptScore W3183669900C82706917 @default.
- W3183669900 hasLocation W31836699001 @default.
- W3183669900 hasOpenAccess W3183669900 @default.
- W3183669900 hasPrimaryLocation W31836699001 @default.
- W3183669900 hasRelatedWork W1982498349 @default.
- W3183669900 hasRelatedWork W1992734408 @default.
- W3183669900 hasRelatedWork W1998249231 @default.
- W3183669900 hasRelatedWork W2033583384 @default.
- W3183669900 hasRelatedWork W2046459879 @default.
- W3183669900 hasRelatedWork W2099788178 @default.
- W3183669900 hasRelatedWork W2441676703 @default.
- W3183669900 hasRelatedWork W2606430476 @default.
- W3183669900 hasRelatedWork W4212983781 @default.
- W3183669900 hasRelatedWork W2082188198 @default.
- W3183669900 hasVolume "193" @default.
- W3183669900 isParatext "false" @default.
- W3183669900 isRetracted "false" @default.
- W3183669900 magId "3183669900" @default.
- W3183669900 workType "article" @default.