Matches in SemOpenAlex for { <https://semopenalex.org/work/W3183877235> ?p ?o ?g. }
- W3183877235 endingPage "127506" @default.
- W3183877235 startingPage "127506" @default.
- W3183877235 abstract "In this study, the reaction mode of high-power pulsed reactive magnetron sputtering and the crystal structure and infrared transparent conductive properties of SnOx thin films prepared at 600 °C were investigated. The effects of sputtering at different oxygen partial pressures from 10 to 24 sccm were examined. For SnOx films deposited at oxygen partial pressures of 10–14 sccm, the reaction mode was dominated by the metallic mode, and the polar unsaturated (101) plane was the preferred orientation of the film crystals. For SnOx films deposited at oxygen partial pressures of 16–18 sccm, the reaction mode was dominated by the transition mode, showing a preferred (110) plane orientation. In the deposition process, at oxygen partial pressure >18 sccm, the reaction proceeded in poisoning mode. As the oxygen partial pressure was increased, the carrier concentration decreased to 1.140 × 1015 cm−3, mobility increased to 14.93 cm2/Vs, and IR transmittance at 4 μm increased. Furthermore, excess O2 resulted in deteriorated electrical properties of the prepared SnOx films, with a maximum resistivity of 502.9 Ω·cm." @default.
- W3183877235 created "2021-08-02" @default.
- W3183877235 creator A5004202325 @default.
- W3183877235 creator A5005055697 @default.
- W3183877235 creator A5013396635 @default.
- W3183877235 creator A5017541012 @default.
- W3183877235 creator A5047235541 @default.
- W3183877235 creator A5049078993 @default.
- W3183877235 creator A5061733048 @default.
- W3183877235 creator A5071663299 @default.
- W3183877235 creator A5073242203 @default.
- W3183877235 creator A5084132515 @default.
- W3183877235 creator A5088358780 @default.
- W3183877235 creator A5089900783 @default.
- W3183877235 date "2021-09-01" @default.
- W3183877235 modified "2023-10-14" @default.
- W3183877235 title "Reaction mode-controlled crystal structure and optical and electrical properties of SnOx infrared transparent conducting films" @default.
- W3183877235 cites W1964645464 @default.
- W3183877235 cites W1972528599 @default.
- W3183877235 cites W1983865991 @default.
- W3183877235 cites W1984088965 @default.
- W3183877235 cites W1984594513 @default.
- W3183877235 cites W2011821059 @default.
- W3183877235 cites W2029848008 @default.
- W3183877235 cites W2037382072 @default.
- W3183877235 cites W2044373672 @default.
- W3183877235 cites W2081031233 @default.
- W3183877235 cites W2084461123 @default.
- W3183877235 cites W2085172915 @default.
- W3183877235 cites W2092300786 @default.
- W3183877235 cites W2140989965 @default.
- W3183877235 cites W2146557039 @default.
- W3183877235 cites W2146889758 @default.
- W3183877235 cites W2149081593 @default.
- W3183877235 cites W2156715863 @default.
- W3183877235 cites W2317138700 @default.
- W3183877235 cites W2332825768 @default.
- W3183877235 cites W2337110853 @default.
- W3183877235 cites W2463537798 @default.
- W3183877235 cites W2509909440 @default.
- W3183877235 cites W2515438965 @default.
- W3183877235 cites W2600181206 @default.
- W3183877235 cites W2774403347 @default.
- W3183877235 cites W2785092745 @default.
- W3183877235 cites W2810377055 @default.
- W3183877235 cites W2888548219 @default.
- W3183877235 cites W2891131938 @default.
- W3183877235 cites W2903967035 @default.
- W3183877235 cites W2904338288 @default.
- W3183877235 cites W2911076257 @default.
- W3183877235 cites W2967700694 @default.
- W3183877235 cites W3002055690 @default.
- W3183877235 cites W3012090791 @default.
- W3183877235 cites W3084500371 @default.
- W3183877235 cites W3110686316 @default.
- W3183877235 doi "https://doi.org/10.1016/j.surfcoat.2021.127506" @default.
- W3183877235 hasPublicationYear "2021" @default.
- W3183877235 type Work @default.
- W3183877235 sameAs 3183877235 @default.
- W3183877235 citedByCount "4" @default.
- W3183877235 countsByYear W31838772352022 @default.
- W3183877235 countsByYear W31838772352023 @default.
- W3183877235 crossrefType "journal-article" @default.
- W3183877235 hasAuthorship W3183877235A5004202325 @default.
- W3183877235 hasAuthorship W3183877235A5005055697 @default.
- W3183877235 hasAuthorship W3183877235A5013396635 @default.
- W3183877235 hasAuthorship W3183877235A5017541012 @default.
- W3183877235 hasAuthorship W3183877235A5047235541 @default.
- W3183877235 hasAuthorship W3183877235A5049078993 @default.
- W3183877235 hasAuthorship W3183877235A5061733048 @default.
- W3183877235 hasAuthorship W3183877235A5071663299 @default.
- W3183877235 hasAuthorship W3183877235A5073242203 @default.
- W3183877235 hasAuthorship W3183877235A5084132515 @default.
- W3183877235 hasAuthorship W3183877235A5088358780 @default.
- W3183877235 hasAuthorship W3183877235A5089900783 @default.
- W3183877235 hasConcept C113196181 @default.
- W3183877235 hasConcept C119599485 @default.
- W3183877235 hasConcept C120665830 @default.
- W3183877235 hasConcept C121332964 @default.
- W3183877235 hasConcept C127413603 @default.
- W3183877235 hasConcept C150493377 @default.
- W3183877235 hasConcept C158355884 @default.
- W3183877235 hasConcept C171250308 @default.
- W3183877235 hasConcept C178790620 @default.
- W3183877235 hasConcept C185592680 @default.
- W3183877235 hasConcept C19067145 @default.
- W3183877235 hasConcept C192562407 @default.
- W3183877235 hasConcept C22423302 @default.
- W3183877235 hasConcept C43617362 @default.
- W3183877235 hasConcept C49040817 @default.
- W3183877235 hasConcept C540031477 @default.
- W3183877235 hasConcept C61427134 @default.
- W3183877235 hasConcept C68463220 @default.
- W3183877235 hasConcept C69990965 @default.
- W3183877235 hasConceptScore W3183877235C113196181 @default.
- W3183877235 hasConceptScore W3183877235C119599485 @default.
- W3183877235 hasConceptScore W3183877235C120665830 @default.
- W3183877235 hasConceptScore W3183877235C121332964 @default.