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- W3183992562 endingPage "149" @default.
- W3183992562 startingPage "146" @default.
- W3183992562 abstract "The production of thin films using the sputtering preparation method is closely related to plasma. The deposition process involves several factors including self-bias voltage, sputter gas pressure, the distance between electrodes, and how to clean the substrate. This study will discuss the effect of variations in gas pressure and electrode distance on the resulting self-bias voltage. The method used is an RF sputtering system equipped with sensors for self-biased pressure and voltage readings. The results show that there is a corelations between pressure and electrode distance with self-biased voltage. Argon gas pressure variations are carried out in the range 4.5 – 8 x 10-2 mbar with variations for each increase in argon gas pressure of 0.5 x 10-2 mbar. The graph plot results show a logarithmic inversely proportional relationship, that is, when the pressure of argon gas is increased, there will be a decrease in self-bias voltage. The variation of the electrode spacing is carried out in the range 2 – 5 x 10-2 meters with a variation of each increase in the electrode distance of 1 x 10-2 meters. The corelations between the distance of electrodes and the self-biased voltage is logarithmic. When the electrode distance is increased there will be an increase in the value of the self-bias voltage." @default.
- W3183992562 created "2021-08-02" @default.
- W3183992562 creator A5063452170 @default.
- W3183992562 date "2021-06-28" @default.
- W3183992562 modified "2023-09-27" @default.
- W3183992562 title "Effect of Gas Pressure and Electrode Distance on Self-Bias Voltage in Sputtering System for Thin Films" @default.
- W3183992562 hasPublicationYear "2021" @default.
- W3183992562 type Work @default.
- W3183992562 sameAs 3183992562 @default.
- W3183992562 citedByCount "0" @default.
- W3183992562 crossrefType "journal-article" @default.
- W3183992562 hasAuthorship W3183992562A5063452170 @default.
- W3183992562 hasConcept C113196181 @default.
- W3183992562 hasConcept C119599485 @default.
- W3183992562 hasConcept C121332964 @default.
- W3183992562 hasConcept C127413603 @default.
- W3183992562 hasConcept C147789679 @default.
- W3183992562 hasConcept C165801399 @default.
- W3183992562 hasConcept C171250308 @default.
- W3183992562 hasConcept C17525397 @default.
- W3183992562 hasConcept C184779094 @default.
- W3183992562 hasConcept C185592680 @default.
- W3183992562 hasConcept C19067145 @default.
- W3183992562 hasConcept C192562407 @default.
- W3183992562 hasConcept C20254490 @default.
- W3183992562 hasConcept C22423302 @default.
- W3183992562 hasConcept C2987918405 @default.
- W3183992562 hasConcept C43617362 @default.
- W3183992562 hasConcept C547737533 @default.
- W3183992562 hasConcept C61427134 @default.
- W3183992562 hasConcept C62520636 @default.
- W3183992562 hasConcept C78762247 @default.
- W3183992562 hasConcept C82706917 @default.
- W3183992562 hasConceptScore W3183992562C113196181 @default.
- W3183992562 hasConceptScore W3183992562C119599485 @default.
- W3183992562 hasConceptScore W3183992562C121332964 @default.
- W3183992562 hasConceptScore W3183992562C127413603 @default.
- W3183992562 hasConceptScore W3183992562C147789679 @default.
- W3183992562 hasConceptScore W3183992562C165801399 @default.
- W3183992562 hasConceptScore W3183992562C171250308 @default.
- W3183992562 hasConceptScore W3183992562C17525397 @default.
- W3183992562 hasConceptScore W3183992562C184779094 @default.
- W3183992562 hasConceptScore W3183992562C185592680 @default.
- W3183992562 hasConceptScore W3183992562C19067145 @default.
- W3183992562 hasConceptScore W3183992562C192562407 @default.
- W3183992562 hasConceptScore W3183992562C20254490 @default.
- W3183992562 hasConceptScore W3183992562C22423302 @default.
- W3183992562 hasConceptScore W3183992562C2987918405 @default.
- W3183992562 hasConceptScore W3183992562C43617362 @default.
- W3183992562 hasConceptScore W3183992562C547737533 @default.
- W3183992562 hasConceptScore W3183992562C61427134 @default.
- W3183992562 hasConceptScore W3183992562C62520636 @default.
- W3183992562 hasConceptScore W3183992562C78762247 @default.
- W3183992562 hasConceptScore W3183992562C82706917 @default.
- W3183992562 hasLocation W31839925621 @default.
- W3183992562 hasOpenAccess W3183992562 @default.
- W3183992562 hasPrimaryLocation W31839925621 @default.
- W3183992562 hasRelatedWork W1967305569 @default.
- W3183992562 hasRelatedWork W1973652738 @default.
- W3183992562 hasRelatedWork W1981618269 @default.
- W3183992562 hasRelatedWork W2003123905 @default.
- W3183992562 hasRelatedWork W2006669917 @default.
- W3183992562 hasRelatedWork W2015149211 @default.
- W3183992562 hasRelatedWork W2019359677 @default.
- W3183992562 hasRelatedWork W2035642851 @default.
- W3183992562 hasRelatedWork W2036908036 @default.
- W3183992562 hasRelatedWork W2049264674 @default.
- W3183992562 hasRelatedWork W2085629954 @default.
- W3183992562 hasRelatedWork W2094090231 @default.
- W3183992562 hasRelatedWork W2118282269 @default.
- W3183992562 hasRelatedWork W2182870034 @default.
- W3183992562 hasRelatedWork W2256814793 @default.
- W3183992562 hasRelatedWork W2373267354 @default.
- W3183992562 hasRelatedWork W2392040469 @default.
- W3183992562 hasRelatedWork W2603972825 @default.
- W3183992562 hasRelatedWork W286962431 @default.
- W3183992562 hasRelatedWork W3178718742 @default.
- W3183992562 hasVolume "4" @default.
- W3183992562 isParatext "false" @default.
- W3183992562 isRetracted "false" @default.
- W3183992562 magId "3183992562" @default.
- W3183992562 workType "article" @default.