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- W3184341163 abstract "An in-plane displacement sensor based on an asymmetric extrinsic fiber Fabry–Perot interferometer (EFPI) is proposed and demonstrated. The asymmetric EFPI composed of a step-shaped external reflector and a cleaved fiber end face can be equivalent to two parallel FPIs with slightly different cavity lengths. By calculating the peak intensity difference of the two FPIs, the in-plane displacement can be demodulated with enhanced sensitivity and suppressed common mode noise. Both theoretical analyses and experimental results show that the sensitivity and the linear range of the in-plane displacement sensor are dependent on the cavity length. A displacement resolution of 5 nm and a linear range of <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mo>±<!-- ± --></mml:mo> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>7</mml:mn> </mml:mrow> <mml:mspace width=thickmathspace /> <mml:mtext>µ<!-- µ --></mml:mtext> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>m</mml:mi> </mml:mrow> </mml:math> under the cavity length of 250 µm are achieved in the experiment. The proposed in-plane displacement sensor with a nanometric resolution and compact size can be widely used in the fields of metrology, accelerometers, and semiconductor manufacture." @default.
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- W3184341163 date "2021-08-09" @default.
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- W3184341163 title "Highly precise in-plane displacement sensor based on an asymmetric fiber Fabry–Perot interferometer" @default.
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- W3184341163 doi "https://doi.org/10.1364/ol.430389" @default.
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