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- W3184930501 abstract "Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ±2nm for obtaining height information.© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W3184930501 date "2007-01-14" @default.
- W3184930501 modified "2023-09-23" @default.
- W3184930501 title "Near-field induced polarization imaging for optical data storage metrology" @default.
- W3184930501 doi "https://doi.org/10.1117/12.685172" @default.
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