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- W3186705974 endingPage "664" @default.
- W3186705974 startingPage "633" @default.
- W3186705974 abstract "The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This paper reviews the materials modification research that has been enabled by the helium ion microscope since its commercialization in 2007, ranging from fundamental studies of beam–sample effects, to the prototyping of new devices with features in the sub-10 nm domain." @default.
- W3186705974 created "2021-08-02" @default.
- W3186705974 creator A5048658820 @default.
- W3186705974 date "2021-07-02" @default.
- W3186705974 modified "2023-10-16" @default.
- W3186705974 title "A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope" @default.
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