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• W3188777769 endingPage "127588" @default.
• W3188777769 startingPage "127588" @default.
• W3188777769 abstract "An oxidation or nitridation treatment was performed on the interfacial layer (IL) with optimal oxidation state in order to form an oxygen diffusion barrier for Ge nMOSFET . Through the analysis of X-ray photoelectron spectroscopy and electrical characterization of Ge nMOSFET, the reaction mechanism and physical model were studied in details. The fewer interface traps and lower subthreshold swing can be achieved by forming oxygen diffusion barrier in an optimal IL with remote NH 3 plasma. As compared to devices with oxidation treatments , that improvement can be attributed to the nitrogen passivation and alloy-like interface formation. The proposed oxygen diffusion barrier with remote NH 3 plasma treatment on IL is a promising technique to improve the interface properties effectively without influencing equivalent oxide thickness for high performance Ge nMOSFET. • An interfacial layer buffer formation method is proposed. • An oxygen diffusion barrier can be formed by remote plasma treatment. • A n-channel Ge transistor can be enhanced by NH 3 plasma. • Reaction mechanism about oxygen diffusion is explained by material analysis." @default.
• W3188777769 created "2021-08-16" @default.
• W3188777769 creator A5005959935 @default.
• W3188777769 creator A5005986011 @default.
• W3188777769 creator A5032207947 @default.
• W3188777769 creator A5039102278 @default.
• W3188777769 creator A5070291389 @default.
• W3188777769 creator A5071278088 @default.
• W3188777769 creator A5084151403 @default.
• W3188777769 date "2021-10-01" @default.
• W3188777769 modified "2023-09-24" @default.
• W3188777769 title "Oxygen diffusion barrier on interfacial layer formed with remote NH3 plasma treatment" @default.
• W3188777769 cites W1970227084 @default.
• W3188777769 cites W1977710284 @default.
• W3188777769 cites W1981076603 @default.
• W3188777769 cites W1985133274 @default.
• W3188777769 cites W2025173576 @default.
• W3188777769 cites W2058862859 @default.
• W3188777769 cites W2064650306 @default.
• W3188777769 cites W2079749892 @default.
• W3188777769 cites W2081062921 @default.
• W3188777769 cites W2219374627 @default.
• W3188777769 cites W2227587290 @default.
• W3188777769 cites W2512725044 @default.
• W3188777769 cites W2605442996 @default.
• W3188777769 cites W2768046739 @default.
• W3188777769 cites W2899648907 @default.
• W3188777769 cites W2907180921 @default.
• W3188777769 cites W2947842856 @default.
• W3188777769 cites W2948233679 @default.
• W3188777769 cites W2948391700 @default.
• W3188777769 cites W3005287994 @default.
• W3188777769 cites W3010365912 @default.
• W3188777769 cites W3012261939 @default.
• W3188777769 cites W3027665713 @default.
• W3188777769 cites W3047468366 @default.
• W3188777769 cites W3086597293 @default.
• W3188777769 cites W3120987477 @default.
• W3188777769 cites W3136835258 @default.
• W3188777769 doi "https://doi.org/10.1016/j.surfcoat.2021.127588" @default.
• W3188777769 hasPublicationYear "2021" @default.
• W3188777769 type Work @default.
• W3188777769 sameAs 3188777769 @default.
• W3188777769 citedByCount "1" @default.
• W3188777769 countsByYear W31887777692022 @default.
• W3188777769 crossrefType "journal-article" @default.
• W3188777769 hasAuthorship W3188777769A5005959935 @default.
• W3188777769 hasAuthorship W3188777769A5005986011 @default.
• W3188777769 hasAuthorship W3188777769A5032207947 @default.
• W3188777769 hasAuthorship W3188777769A5039102278 @default.
• W3188777769 hasAuthorship W3188777769A5070291389 @default.
• W3188777769 hasAuthorship W3188777769A5071278088 @default.
• W3188777769 hasAuthorship W3188777769A5084151403 @default.
• W3188777769 hasConcept C113196181 @default.
• W3188777769 hasConcept C121332964 @default.
• W3188777769 hasConcept C127413603 @default.
• W3188777769 hasConcept C171250308 @default.
• W3188777769 hasConcept C175708663 @default.
• W3188777769 hasConcept C178790620 @default.
• W3188777769 hasConcept C185592680 @default.
• W3188777769 hasConcept C191897082 @default.
• W3188777769 hasConcept C192562407 @default.
• W3188777769 hasConcept C2778836790 @default.
• W3188777769 hasConcept C2779227376 @default.
• W3188777769 hasConcept C2779833192 @default.
• W3188777769 hasConcept C2779851234 @default.
• W3188777769 hasConcept C2780740191 @default.
• W3188777769 hasConcept C33574316 @default.
• W3188777769 hasConcept C42360764 @default.
• W3188777769 hasConcept C43617362 @default.
• W3188777769 hasConcept C540031477 @default.
• W3188777769 hasConcept C57410435 @default.
• W3188777769 hasConcept C62520636 @default.
• W3188777769 hasConcept C69357855 @default.
• W3188777769 hasConcept C82706917 @default.
• W3188777769 hasConcept C97355855 @default.
• W3188777769 hasConceptScore W3188777769C113196181 @default.
• W3188777769 hasConceptScore W3188777769C121332964 @default.
• W3188777769 hasConceptScore W3188777769C127413603 @default.
• W3188777769 hasConceptScore W3188777769C171250308 @default.
• W3188777769 hasConceptScore W3188777769C175708663 @default.
• W3188777769 hasConceptScore W3188777769C178790620 @default.
• W3188777769 hasConceptScore W3188777769C185592680 @default.
• W3188777769 hasConceptScore W3188777769C191897082 @default.
• W3188777769 hasConceptScore W3188777769C192562407 @default.
• W3188777769 hasConceptScore W3188777769C2778836790 @default.
• W3188777769 hasConceptScore W3188777769C2779227376 @default.
• W3188777769 hasConceptScore W3188777769C2779833192 @default.
• W3188777769 hasConceptScore W3188777769C2779851234 @default.
• W3188777769 hasConceptScore W3188777769C2780740191 @default.
• W3188777769 hasConceptScore W3188777769C33574316 @default.
• W3188777769 hasConceptScore W3188777769C42360764 @default.
• W3188777769 hasConceptScore W3188777769C43617362 @default.
• W3188777769 hasConceptScore W3188777769C540031477 @default.
• W3188777769 hasConceptScore W3188777769C57410435 @default.
• W3188777769 hasConceptScore W3188777769C62520636 @default.
• W3188777769 hasConceptScore W3188777769C69357855 @default.
• W3188777769 hasConceptScore W3188777769C82706917 @default.

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