Matches in SemOpenAlex for { <https://semopenalex.org/work/W3189741785> ?p ?o ?g. }
- W3189741785 endingPage "608" @default.
- W3189741785 startingPage "608" @default.
- W3189741785 abstract "Amorphous metal oxide has been a popular choice for thin film material in recent years due to its high uniformity. The dielectric layer is one of the core materials of the thin film transistor (TFT), and it affects the ability of charges storage in TFT. There is a conflict between a high relative dielectric constant and a wide band gap, so we solved this problem by using multiple metals to increase the entropy of the system. In this paper, we prepared zirconium-yttrium-aluminum-magnesium-oxide (ZYAMO) dielectric layers with a high relative dielectric constant using the solution method. The basic properties of ZYAMO films were measured by an atomic force microscope (AFM), an ultraviolet-visible spectrophotometer (UV-VIS), etc. It was observed that ZYAMO thin films had a larger optical band when the annealing temperature increased. Then, metal-insulator-metal (MIM) devices were fabricated to measure the electrical properties. We found that the leakage current density of the device is relatively lower and the ZYAMO thin film had a higher relative dielectric constant as the concentration went up. Finally, it reached a high relative dielectric constant of 56.09, while the leakage current density was no higher than 1.63 × 10−6 A/cm2@ 0.5 MV/cm at 1.0 M and 400 °C. Therefore, the amorphous ZYAMO thin films has a great application in the field of high permittivity request devices in the future." @default.
- W3189741785 created "2021-08-16" @default.
- W3189741785 creator A5004928994 @default.
- W3189741785 creator A5005781729 @default.
- W3189741785 creator A5007599490 @default.
- W3189741785 creator A5013195832 @default.
- W3189741785 creator A5022588641 @default.
- W3189741785 creator A5025827852 @default.
- W3189741785 creator A5036326490 @default.
- W3189741785 creator A5044333513 @default.
- W3189741785 creator A5070010908 @default.
- W3189741785 creator A5078851644 @default.
- W3189741785 date "2021-08-10" @default.
- W3189741785 modified "2023-10-10" @default.
- W3189741785 title "Application of Amorphous Zirconium-Yttrium-Aluminum-Magnesium-Oxide Thin Film with a High Relative Dielectric Constant Prepared by Spin-Coating" @default.
- W3189741785 cites W1501094967 @default.
- W3189741785 cites W1587278902 @default.
- W3189741785 cites W1631885371 @default.
- W3189741785 cites W1944125382 @default.
- W3189741785 cites W1966430813 @default.
- W3189741785 cites W1968317827 @default.
- W3189741785 cites W1983096713 @default.
- W3189741785 cites W1992721896 @default.
- W3189741785 cites W1995548609 @default.
- W3189741785 cites W2001380373 @default.
- W3189741785 cites W2003645630 @default.
- W3189741785 cites W2004607850 @default.
- W3189741785 cites W2008445316 @default.
- W3189741785 cites W2011399013 @default.
- W3189741785 cites W2019910167 @default.
- W3189741785 cites W2025612745 @default.
- W3189741785 cites W2028992594 @default.
- W3189741785 cites W2030367837 @default.
- W3189741785 cites W2034576469 @default.
- W3189741785 cites W2037716606 @default.
- W3189741785 cites W2038023870 @default.
- W3189741785 cites W2038587860 @default.
- W3189741785 cites W2043491835 @default.
- W3189741785 cites W2043646598 @default.
- W3189741785 cites W2049436779 @default.
- W3189741785 cites W2053674573 @default.
- W3189741785 cites W2055146671 @default.
- W3189741785 cites W2064997206 @default.
- W3189741785 cites W2065937634 @default.
- W3189741785 cites W2067380883 @default.
- W3189741785 cites W2069895554 @default.
- W3189741785 cites W2080087346 @default.
- W3189741785 cites W2080762898 @default.
- W3189741785 cites W2086729821 @default.
- W3189741785 cites W2092426063 @default.
- W3189741785 cites W2101368497 @default.
- W3189741785 cites W2104820185 @default.
- W3189741785 cites W2113334515 @default.
- W3189741785 cites W2121784102 @default.
- W3189741785 cites W2126360176 @default.
- W3189741785 cites W2137819090 @default.
- W3189741785 cites W2162957680 @default.
- W3189741785 cites W2318787255 @default.
- W3189741785 cites W2322161457 @default.
- W3189741785 cites W237080446 @default.
- W3189741785 cites W2583121696 @default.
- W3189741785 cites W2594924523 @default.
- W3189741785 cites W2642016080 @default.
- W3189741785 cites W2752335642 @default.
- W3189741785 cites W2793018310 @default.
- W3189741785 cites W2799780684 @default.
- W3189741785 cites W2894388424 @default.
- W3189741785 cites W2908717654 @default.
- W3189741785 cites W2942554271 @default.
- W3189741785 cites W2954515036 @default.
- W3189741785 cites W2983234898 @default.
- W3189741785 cites W2989740960 @default.
- W3189741785 cites W2996294329 @default.
- W3189741785 cites W2998938070 @default.
- W3189741785 cites W3001002848 @default.
- W3189741785 cites W3010642926 @default.
- W3189741785 cites W3016382152 @default.
- W3189741785 cites W3034886985 @default.
- W3189741785 cites W3093482938 @default.
- W3189741785 cites W3107894816 @default.
- W3189741785 cites W3136658986 @default.
- W3189741785 cites W3164629359 @default.
- W3189741785 doi "https://doi.org/10.3390/membranes11080608" @default.
- W3189741785 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/8400283" @default.
- W3189741785 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/34436371" @default.
- W3189741785 hasPublicationYear "2021" @default.
- W3189741785 type Work @default.
- W3189741785 sameAs 3189741785 @default.
- W3189741785 citedByCount "5" @default.
- W3189741785 countsByYear W31897417852022 @default.
- W3189741785 countsByYear W31897417852023 @default.
- W3189741785 crossrefType "journal-article" @default.
- W3189741785 hasAuthorship W3189741785A5004928994 @default.
- W3189741785 hasAuthorship W3189741785A5005781729 @default.
- W3189741785 hasAuthorship W3189741785A5007599490 @default.
- W3189741785 hasAuthorship W3189741785A5013195832 @default.
- W3189741785 hasAuthorship W3189741785A5022588641 @default.
- W3189741785 hasAuthorship W3189741785A5025827852 @default.