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• W3191156735 abstract "In-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system’s transfer function is required at regular intervals. This paper compares three methods of dimensional calibration for a spectral domain low coherence interferometer using a reference laser interferometer versus two types of single material measure. Additionally, the impact of dataset sparsity is shown along with the effect of using a singular calibration dataset for system performance when operating across different media." @default.
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• W3191156735 date "2021-07-28" @default.
• W3191156735 modified "2023-10-18" @default.
• W3191156735 title "Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded Metrology Applications" @default.
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• W3191156735 doi "https://doi.org/10.3390/s21155101" @default.
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