Matches in SemOpenAlex for { <https://semopenalex.org/work/W3194591345> ?p ?o ?g. }
- W3194591345 abstract "Abstract MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies set the boundary conditions for inductor design and their electrical and mechanical performance. This review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication, presents recent advances in 3D additive fabrication technologies, and discusses the challenges and opportunities of MEMS inductors for two emerging applications, namely, integrated power electronics and neurotechnologies. Among the four top-down MEMS fabrication approaches, 3D surface micromachining and through-substrate-via (TSV) fabrication technology have been intensively studied to fabricate 3D inductors such as solenoid and toroid in-substrate TSV inductors. While 3D inductors are preferred for their high-quality factor, high power density, and low parasitic capacitance, in-substrate TSV inductors offer an additional unique advantage for 3D system integration and efficient thermal dissipation. These features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power converters. From another perspective, 3D bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS technologies. Finally, we discuss inspiring and emerging research opportunities for MEMS inductors." @default.
- W3194591345 created "2021-08-30" @default.
- W3194591345 creator A5006770255 @default.
- W3194591345 creator A5025988817 @default.
- W3194591345 creator A5029782197 @default.
- W3194591345 creator A5036591063 @default.
- W3194591345 creator A5042894524 @default.
- W3194591345 creator A5043941702 @default.
- W3194591345 creator A5059034500 @default.
- W3194591345 creator A5077916544 @default.
- W3194591345 date "2021-08-11" @default.
- W3194591345 modified "2023-10-14" @default.
- W3194591345 title "MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies" @default.
- W3194591345 cites W1493462969 @default.
- W3194591345 cites W1600493855 @default.
- W3194591345 cites W1759444622 @default.
- W3194591345 cites W180800269 @default.
- W3194591345 cites W1815208202 @default.
- W3194591345 cites W1965964189 @default.
- W3194591345 cites W1971596937 @default.
- W3194591345 cites W1974407690 @default.
- W3194591345 cites W1977982587 @default.
- W3194591345 cites W1981329947 @default.
- W3194591345 cites W1982911639 @default.
- W3194591345 cites W1986065446 @default.
- W3194591345 cites W1989489627 @default.
- W3194591345 cites W1997545931 @default.
- W3194591345 cites W2000258488 @default.
- W3194591345 cites W2005220526 @default.
- W3194591345 cites W2007235308 @default.
- W3194591345 cites W2014483568 @default.
- W3194591345 cites W2014493574 @default.
- W3194591345 cites W2022602708 @default.
- W3194591345 cites W2026635780 @default.
- W3194591345 cites W2031805860 @default.
- W3194591345 cites W2033026886 @default.
- W3194591345 cites W2033071802 @default.
- W3194591345 cites W2034390909 @default.
- W3194591345 cites W2035057914 @default.
- W3194591345 cites W2038595430 @default.
- W3194591345 cites W2043392422 @default.
- W3194591345 cites W2044043771 @default.
- W3194591345 cites W2044828379 @default.
- W3194591345 cites W2045086164 @default.
- W3194591345 cites W2048153962 @default.
- W3194591345 cites W2050618589 @default.
- W3194591345 cites W2051909620 @default.
- W3194591345 cites W2062809380 @default.
- W3194591345 cites W2066124125 @default.
- W3194591345 cites W2067143020 @default.
- W3194591345 cites W2072342926 @default.
- W3194591345 cites W2079831792 @default.
- W3194591345 cites W2080264318 @default.
- W3194591345 cites W2084332573 @default.
- W3194591345 cites W2097067358 @default.
- W3194591345 cites W2104793872 @default.
- W3194591345 cites W2106038354 @default.
- W3194591345 cites W2106717248 @default.
- W3194591345 cites W2116153042 @default.
- W3194591345 cites W2116371264 @default.
- W3194591345 cites W2122381917 @default.
- W3194591345 cites W2124171366 @default.
- W3194591345 cites W2128183150 @default.
- W3194591345 cites W2129870118 @default.
- W3194591345 cites W2132618262 @default.
- W3194591345 cites W2133308853 @default.
- W3194591345 cites W2136092891 @default.
- W3194591345 cites W2138097200 @default.
- W3194591345 cites W2143670085 @default.
- W3194591345 cites W2147250609 @default.
- W3194591345 cites W2148561821 @default.
- W3194591345 cites W2149371897 @default.
- W3194591345 cites W2149454230 @default.
- W3194591345 cites W2151676927 @default.
- W3194591345 cites W2157695576 @default.
- W3194591345 cites W2158483122 @default.
- W3194591345 cites W2160428624 @default.
- W3194591345 cites W2161538339 @default.
- W3194591345 cites W2163729359 @default.
- W3194591345 cites W2164532932 @default.
- W3194591345 cites W2166348694 @default.
- W3194591345 cites W2171547390 @default.
- W3194591345 cites W2216923033 @default.
- W3194591345 cites W2229712923 @default.
- W3194591345 cites W2245483849 @default.
- W3194591345 cites W2252404105 @default.
- W3194591345 cites W2260561380 @default.
- W3194591345 cites W2277295529 @default.
- W3194591345 cites W2280327050 @default.
- W3194591345 cites W2292508185 @default.
- W3194591345 cites W2327378600 @default.
- W3194591345 cites W2337420586 @default.
- W3194591345 cites W2342558838 @default.
- W3194591345 cites W2379198505 @default.
- W3194591345 cites W2407662727 @default.
- W3194591345 cites W2472522812 @default.
- W3194591345 cites W2495352079 @default.
- W3194591345 cites W2509717874 @default.
- W3194591345 cites W2529319751 @default.
- W3194591345 cites W2531133706 @default.