Matches in SemOpenAlex for { <https://semopenalex.org/work/W3195469951> ?p ?o ?g. }
- W3195469951 endingPage "311" @default.
- W3195469951 startingPage "283" @default.
- W3195469951 abstract "Abstract Aluminum nitride (AlN) has been attracting increasing research attention and significant progress has been taking place due to their wide applications in ultraviolet light emitting diodes, laser diodes, surface acoustic wave devices and so on. Wherein the quality of AlN films is the key factor to realize high-performance devices and various techniques have been developed for AlN epitaxy. In this chapter, we will discuss the substrate selection for AlN epitaxy, introduce the popular AlN film growth methods including Molecular Beam Epitaxy, Metalorganic Vapor Phase Epitaxy, Physical Vapor Deposition and summarize recent progresses made with these growth methods." @default.
- W3195469951 created "2021-08-30" @default.
- W3195469951 creator A5018896619 @default.
- W3195469951 creator A5075448316 @default.
- W3195469951 date "2021-01-01" @default.
- W3195469951 modified "2023-09-27" @default.
- W3195469951 title "Material epitaxy of AlN thin films" @default.
- W3195469951 cites W1784720504 @default.
- W3195469951 cites W1966103998 @default.
- W3195469951 cites W1971534932 @default.
- W3195469951 cites W1971940500 @default.
- W3195469951 cites W1972086839 @default.
- W3195469951 cites W1974072513 @default.
- W3195469951 cites W1976318339 @default.
- W3195469951 cites W1980515667 @default.
- W3195469951 cites W1981106976 @default.
- W3195469951 cites W1983392694 @default.
- W3195469951 cites W1984891685 @default.
- W3195469951 cites W1987279449 @default.
- W3195469951 cites W1991428303 @default.
- W3195469951 cites W2000750763 @default.
- W3195469951 cites W2002774257 @default.
- W3195469951 cites W2003703679 @default.
- W3195469951 cites W2012494369 @default.
- W3195469951 cites W2015814636 @default.
- W3195469951 cites W2018398346 @default.
- W3195469951 cites W2020162197 @default.
- W3195469951 cites W2022348067 @default.
- W3195469951 cites W2024914013 @default.
- W3195469951 cites W2032323640 @default.
- W3195469951 cites W2032999325 @default.
- W3195469951 cites W2033839082 @default.
- W3195469951 cites W2034656918 @default.
- W3195469951 cites W2036244501 @default.
- W3195469951 cites W2038936151 @default.
- W3195469951 cites W2043350037 @default.
- W3195469951 cites W2045319699 @default.
- W3195469951 cites W2048333394 @default.
- W3195469951 cites W2053214712 @default.
- W3195469951 cites W2059890867 @default.
- W3195469951 cites W2066105689 @default.
- W3195469951 cites W2066627854 @default.
- W3195469951 cites W2074247637 @default.
- W3195469951 cites W2077485371 @default.
- W3195469951 cites W2078214946 @default.
- W3195469951 cites W2079366256 @default.
- W3195469951 cites W2086182444 @default.
- W3195469951 cites W2086815798 @default.
- W3195469951 cites W2089203163 @default.
- W3195469951 cites W2089939523 @default.
- W3195469951 cites W2090569866 @default.
- W3195469951 cites W2092158986 @default.
- W3195469951 cites W2094916246 @default.
- W3195469951 cites W2099265494 @default.
- W3195469951 cites W2119392370 @default.
- W3195469951 cites W2121327309 @default.
- W3195469951 cites W2127628584 @default.
- W3195469951 cites W2135792158 @default.
- W3195469951 cites W2158981978 @default.
- W3195469951 cites W2165594527 @default.
- W3195469951 cites W2224284884 @default.
- W3195469951 cites W225928403 @default.
- W3195469951 cites W2286470707 @default.
- W3195469951 cites W2336250289 @default.
- W3195469951 cites W2342000147 @default.
- W3195469951 cites W2441602329 @default.
- W3195469951 cites W2526040030 @default.
- W3195469951 cites W2547530437 @default.
- W3195469951 cites W2555018539 @default.
- W3195469951 cites W2567028396 @default.
- W3195469951 cites W2589462217 @default.
- W3195469951 cites W2593725352 @default.
- W3195469951 cites W2615488829 @default.
- W3195469951 cites W2790294021 @default.
- W3195469951 cites W2790352402 @default.
- W3195469951 cites W2890121481 @default.
- W3195469951 cites W2896632917 @default.
- W3195469951 cites W2923831016 @default.
- W3195469951 cites W2937443594 @default.
- W3195469951 cites W2944402315 @default.
- W3195469951 cites W3005558837 @default.
- W3195469951 cites W3127817653 @default.
- W3195469951 cites W2212751976 @default.
- W3195469951 doi "https://doi.org/10.1016/bs.semsem.2021.06.002" @default.
- W3195469951 hasPublicationYear "2021" @default.
- W3195469951 type Work @default.
- W3195469951 sameAs 3195469951 @default.
- W3195469951 citedByCount "0" @default.
- W3195469951 crossrefType "book-chapter" @default.
- W3195469951 hasAuthorship W3195469951A5018896619 @default.
- W3195469951 hasAuthorship W3195469951A5075448316 @default.
- W3195469951 hasConcept C110738630 @default.
- W3195469951 hasConcept C159985019 @default.
- W3195469951 hasConcept C171250308 @default.
- W3195469951 hasConcept C19067145 @default.
- W3195469951 hasConcept C192562407 @default.
- W3195469951 hasConcept C2779227376 @default.
- W3195469951 hasConcept C49040817 @default.