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- W3195769038 endingPage "130718" @default.
- W3195769038 startingPage "130718" @default.
- W3195769038 abstract "The continued downscaling of integrated circuits has brought into focus the development of new molecularly thick barrier/capping materials and novel fabrication processes for Cu interconnects with gradually diminished lateral dimensions. Here, an all-wet encapsulation/electroless superfilling process is developed for the first time to lay an amino-based self-assembled monolayer (SAM) all around nanoscaled Cu interconnects embedded in SiO2. Under bias stressing (8.0 × 108–1.6 × 109 A/cm2), premature failure of otherwise identical but bare Cu interconnects occurs within a few seconds. However, SAM-encapsulated Cu interconnects are extremely EM resistant with lifetimes on the order of 103 s under the same rigorous bias stressing. The strengthening mechanism is elucidated experimentally from imaging observations of electric-field induced Cu diffusion routes and theoretically from the prediction of the Black’s equation in terms of EM-induced failure modes." @default.
- W3195769038 created "2021-08-30" @default.
- W3195769038 creator A5007101760 @default.
- W3195769038 creator A5029793162 @default.
- W3195769038 creator A5078739598 @default.
- W3195769038 creator A5081770274 @default.
- W3195769038 creator A5084552941 @default.
- W3195769038 date "2021-12-01" @default.
- W3195769038 modified "2023-09-25" @default.
- W3195769038 title "All-wet encapsulation and electroless superfilling process for the fabrication of self-assembled-monolayer encapsulated copper interconnects with enhanced electromigration reliability" @default.
- W3195769038 cites W1970826249 @default.
- W3195769038 cites W1983731832 @default.
- W3195769038 cites W1986144954 @default.
- W3195769038 cites W1997311140 @default.
- W3195769038 cites W2014721931 @default.
- W3195769038 cites W2082474298 @default.
- W3195769038 cites W2315511925 @default.
- W3195769038 cites W2359295852 @default.
- W3195769038 cites W2504523174 @default.
- W3195769038 cites W2546163117 @default.
- W3195769038 cites W2775718938 @default.
- W3195769038 cites W2781591968 @default.
- W3195769038 cites W2909694071 @default.
- W3195769038 cites W2918388571 @default.
- W3195769038 cites W2996250239 @default.
- W3195769038 cites W3014298623 @default.
- W3195769038 cites W3096449895 @default.
- W3195769038 cites W3104478117 @default.
- W3195769038 cites W3160319283 @default.
- W3195769038 doi "https://doi.org/10.1016/j.matlet.2021.130718" @default.
- W3195769038 hasPublicationYear "2021" @default.
- W3195769038 type Work @default.
- W3195769038 sameAs 3195769038 @default.
- W3195769038 citedByCount "3" @default.
- W3195769038 countsByYear W31957690382022 @default.
- W3195769038 countsByYear W31957690382023 @default.
- W3195769038 crossrefType "journal-article" @default.
- W3195769038 hasAuthorship W3195769038A5007101760 @default.
- W3195769038 hasAuthorship W3195769038A5029793162 @default.
- W3195769038 hasAuthorship W3195769038A5078739598 @default.
- W3195769038 hasAuthorship W3195769038A5081770274 @default.
- W3195769038 hasAuthorship W3195769038A5084552941 @default.
- W3195769038 hasConcept C123745756 @default.
- W3195769038 hasConcept C136525101 @default.
- W3195769038 hasConcept C138055206 @default.
- W3195769038 hasConcept C142724271 @default.
- W3195769038 hasConcept C159985019 @default.
- W3195769038 hasConcept C171250308 @default.
- W3195769038 hasConcept C191897082 @default.
- W3195769038 hasConcept C192562407 @default.
- W3195769038 hasConcept C204787440 @default.
- W3195769038 hasConcept C2778836790 @default.
- W3195769038 hasConcept C2779227376 @default.
- W3195769038 hasConcept C31258907 @default.
- W3195769038 hasConcept C41008148 @default.
- W3195769038 hasConcept C49040817 @default.
- W3195769038 hasConcept C544778455 @default.
- W3195769038 hasConcept C66283442 @default.
- W3195769038 hasConcept C7070889 @default.
- W3195769038 hasConcept C71924100 @default.
- W3195769038 hasConceptScore W3195769038C123745756 @default.
- W3195769038 hasConceptScore W3195769038C136525101 @default.
- W3195769038 hasConceptScore W3195769038C138055206 @default.
- W3195769038 hasConceptScore W3195769038C142724271 @default.
- W3195769038 hasConceptScore W3195769038C159985019 @default.
- W3195769038 hasConceptScore W3195769038C171250308 @default.
- W3195769038 hasConceptScore W3195769038C191897082 @default.
- W3195769038 hasConceptScore W3195769038C192562407 @default.
- W3195769038 hasConceptScore W3195769038C204787440 @default.
- W3195769038 hasConceptScore W3195769038C2778836790 @default.
- W3195769038 hasConceptScore W3195769038C2779227376 @default.
- W3195769038 hasConceptScore W3195769038C31258907 @default.
- W3195769038 hasConceptScore W3195769038C41008148 @default.
- W3195769038 hasConceptScore W3195769038C49040817 @default.
- W3195769038 hasConceptScore W3195769038C544778455 @default.
- W3195769038 hasConceptScore W3195769038C66283442 @default.
- W3195769038 hasConceptScore W3195769038C7070889 @default.
- W3195769038 hasConceptScore W3195769038C71924100 @default.
- W3195769038 hasFunder F4320322795 @default.
- W3195769038 hasLocation W31957690381 @default.
- W3195769038 hasOpenAccess W3195769038 @default.
- W3195769038 hasPrimaryLocation W31957690381 @default.
- W3195769038 hasRelatedWork W1499637132 @default.
- W3195769038 hasRelatedWork W1846200327 @default.
- W3195769038 hasRelatedWork W2172277529 @default.
- W3195769038 hasRelatedWork W2315337917 @default.
- W3195769038 hasRelatedWork W2319811447 @default.
- W3195769038 hasRelatedWork W2755111472 @default.
- W3195769038 hasRelatedWork W2776341574 @default.
- W3195769038 hasRelatedWork W2782814017 @default.
- W3195769038 hasRelatedWork W2944821157 @default.
- W3195769038 hasRelatedWork W3195769038 @default.
- W3195769038 hasVolume "304" @default.
- W3195769038 isParatext "false" @default.
- W3195769038 isRetracted "false" @default.
- W3195769038 magId "3195769038" @default.
- W3195769038 workType "article" @default.