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• W3196704900 abstract "This paper reports on the experimental characterization of a vacuum packaged bulk acoustic wave disk gyroscope with T-shape anchors fabricated on a (100) single-crystal silicon substrate. Improvements in key device performance parameters are achieved by implementing mode matching using electrostatic frequency tuning to decrease the frequency split between two near-degenerate bulk acoustic modes from 4 Hz to 0.4 Hz. Gyroscopic operation is demonstrated by driving one of the secondary degenerate elliptical modes while sensing the response in the other elliptical mode, both demonstrating quality factors exceeding 1 million at an operating frequency of <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$sim 976$ </tex-math></inline-formula> kHz. As a result, the mechanical sensitivity of the gyroscope is improved by a factor of 7.76 times for near mode-matched operation relative to the case with no tuning of the frequency spacing between the modes. Additionally, the angle random walk and bias instability were improved from <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$0.042~^{circ }/{sqrt {h}}$ </tex-math></inline-formula> to <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$0.037~^{circ }/{sqrt {h}}$ </tex-math></inline-formula> and <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$1.65~^{circ }$ </tex-math></inline-formula> /h to <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$0.95~^{circ }$ </tex-math></inline-formula> /h respectively, benchmarking favorably with respect to the state-of-the-art of BAW disk gyroscopes. [2021-0151]" @default.
• W3196704900 created "2021-09-13" @default.
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• W3196704900 date "2021-12-01" @default.
• W3196704900 modified "2023-10-14" @default.
• W3196704900 title "Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope" @default.
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• W3196704900 doi "https://doi.org/10.1109/jmems.2021.3107941" @default.
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