Matches in SemOpenAlex for { <https://semopenalex.org/work/W3199604189> ?p ?o ?g. }
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- W3199604189 endingPage "19" @default.
- W3199604189 startingPage "13" @default.
- W3199604189 abstract "Abstract X-ray ptychography, as recent studies show, has the potential to bridge the gap that currently exists between conventional X-ray imaging and electron microscopy. This article covers the evolution of the technology from basic 2D imaging to computed tomography to 3D ptychographic X-ray laminography (PyXL) with zoom. To demonstrate the capabilities of PyXL, a 16-nm FinFET logic IC was mechanically polished to a thickness of 20 µm and several regions were imaged at various levels of resolution." @default.
- W3199604189 created "2021-09-27" @default.
- W3199604189 creator A5058292156 @default.
- W3199604189 creator A5079469283 @default.
- W3199604189 creator A5084146256 @default.
- W3199604189 date "2021-05-01" @default.
- W3199604189 modified "2023-10-05" @default.
- W3199604189 title "State-of-the-Art High-Resolution 3D X-ray Microscopy for Imaging of Integrated Circuits" @default.
- W3199604189 doi "https://doi.org/10.31399/asm.edfa.2021-2.p013" @default.
- W3199604189 hasPublicationYear "2021" @default.
- W3199604189 type Work @default.
- W3199604189 sameAs 3199604189 @default.
- W3199604189 citedByCount "0" @default.
- W3199604189 crossrefType "journal-article" @default.
- W3199604189 hasAuthorship W3199604189A5058292156 @default.
- W3199604189 hasAuthorship W3199604189A5079469283 @default.
- W3199604189 hasAuthorship W3199604189A5084146256 @default.
- W3199604189 hasConcept C120665830 @default.
- W3199604189 hasConcept C121332964 @default.
- W3199604189 hasConcept C124913957 @default.
- W3199604189 hasConcept C138268822 @default.
- W3199604189 hasConcept C147080431 @default.
- W3199604189 hasConcept C15336307 @default.
- W3199604189 hasConcept C154945302 @default.
- W3199604189 hasConcept C192562407 @default.
- W3199604189 hasConcept C207114421 @default.
- W3199604189 hasConcept C2779328170 @default.
- W3199604189 hasConcept C41008148 @default.
- W3199604189 hasConcept C78153596 @default.
- W3199604189 hasConceptScore W3199604189C120665830 @default.
- W3199604189 hasConceptScore W3199604189C121332964 @default.
- W3199604189 hasConceptScore W3199604189C124913957 @default.
- W3199604189 hasConceptScore W3199604189C138268822 @default.
- W3199604189 hasConceptScore W3199604189C147080431 @default.
- W3199604189 hasConceptScore W3199604189C15336307 @default.
- W3199604189 hasConceptScore W3199604189C154945302 @default.
- W3199604189 hasConceptScore W3199604189C192562407 @default.
- W3199604189 hasConceptScore W3199604189C207114421 @default.
- W3199604189 hasConceptScore W3199604189C2779328170 @default.
- W3199604189 hasConceptScore W3199604189C41008148 @default.
- W3199604189 hasConceptScore W3199604189C78153596 @default.
- W3199604189 hasIssue "2" @default.
- W3199604189 hasLocation W31996041891 @default.
- W3199604189 hasOpenAccess W3199604189 @default.
- W3199604189 hasPrimaryLocation W31996041891 @default.
- W3199604189 hasRelatedWork W2034964814 @default.
- W3199604189 hasRelatedWork W2059264719 @default.
- W3199604189 hasRelatedWork W2108278264 @default.
- W3199604189 hasRelatedWork W2296336181 @default.
- W3199604189 hasRelatedWork W2475009123 @default.
- W3199604189 hasRelatedWork W2752324317 @default.
- W3199604189 hasRelatedWork W2784982589 @default.
- W3199604189 hasRelatedWork W2907354781 @default.
- W3199604189 hasRelatedWork W3146035358 @default.
- W3199604189 hasRelatedWork W3157767073 @default.
- W3199604189 hasVolume "23" @default.
- W3199604189 isParatext "false" @default.
- W3199604189 isRetracted "false" @default.
- W3199604189 magId "3199604189" @default.
- W3199604189 workType "article" @default.