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- W3199802039 endingPage "114001" @default.
- W3199802039 startingPage "114001" @default.
- W3199802039 abstract "This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO3) based acoustic microsystems. Thanks to their high electromechanical coupling (k2), low loss, and great frequency scalability, thin-film LiNbO3 has outperformed state-of-the-art acoustic technologies in the past decade. This paper first reviews the acoustic wave transduction and propagation in thin-film LiNbO3 and then showcases the emerging acoustic applications. Outlook for further platform development and more functions is offered for future thin-film LiNbO3 based acoustic microsystems development." @default.
- W3199802039 created "2021-09-27" @default.
- W3199802039 creator A5016497308 @default.
- W3199802039 creator A5058428199 @default.
- W3199802039 date "2021-09-30" @default.
- W3199802039 modified "2023-10-18" @default.
- W3199802039 title "RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook" @default.
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- W3199802039 doi "https://doi.org/10.1088/1361-6439/ac288f" @default.