Matches in SemOpenAlex for { <https://semopenalex.org/work/W3200215546> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W3200215546 abstract "This work aims to understand the origin of propagation losses in GaN-on-Si devices at microwave frequencies thanks to original AFM's electrical modes such as scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy (SSRM). AlN films on Si substrate were grown using Metalorganic Vapor Phase Epitaxy (MOVPE) technique. SCM and SSRM measurements evidence a p-type conductive channel as well as a pn-junction beneath the AlN/Si interface. The diffusion depths of Al and Ga atoms obtained by Secondary Ion Mass Spectroscopy (SIMS) are in good agreement with those deduced from SCM and SSRM. Sample grown at lower temperature (1000°C) exhibits a conductive channel and a junction over a shallow depth explaining its lower propagation losses in comparison with those synthesized at higher temperature (1150°C). Thus, monitoring the dopant diffusion beneath the AlN/Si interface is crucial to achieve efficient GaN-on-Si microwave power devices." @default.
- W3200215546 created "2021-09-27" @default.
- W3200215546 creator A5002509145 @default.
- W3200215546 creator A5015542988 @default.
- W3200215546 creator A5018664866 @default.
- W3200215546 creator A5025684249 @default.
- W3200215546 creator A5038329967 @default.
- W3200215546 creator A5055755772 @default.
- W3200215546 creator A5068204908 @default.
- W3200215546 creator A5074374021 @default.
- W3200215546 creator A5076494360 @default.
- W3200215546 creator A5083884144 @default.
- W3200215546 date "2021-06-14" @default.
- W3200215546 modified "2023-09-26" @default.
- W3200215546 title "Investigation of electrical activity at the AlN/Si interface using scanning capacitance microscopy and scanning spreading resistance microscopy" @default.
- W3200215546 hasPublicationYear "2021" @default.
- W3200215546 type Work @default.
- W3200215546 sameAs 3200215546 @default.
- W3200215546 citedByCount "0" @default.
- W3200215546 crossrefType "proceedings-article" @default.
- W3200215546 hasAuthorship W3200215546A5002509145 @default.
- W3200215546 hasAuthorship W3200215546A5015542988 @default.
- W3200215546 hasAuthorship W3200215546A5018664866 @default.
- W3200215546 hasAuthorship W3200215546A5025684249 @default.
- W3200215546 hasAuthorship W3200215546A5038329967 @default.
- W3200215546 hasAuthorship W3200215546A5055755772 @default.
- W3200215546 hasAuthorship W3200215546A5068204908 @default.
- W3200215546 hasAuthorship W3200215546A5074374021 @default.
- W3200215546 hasAuthorship W3200215546A5076494360 @default.
- W3200215546 hasAuthorship W3200215546A5083884144 @default.
- W3200215546 hasBestOaLocation W32002155461 @default.
- W3200215546 hasConcept C113843644 @default.
- W3200215546 hasConcept C120665830 @default.
- W3200215546 hasConcept C121332964 @default.
- W3200215546 hasConcept C147080431 @default.
- W3200215546 hasConcept C147789679 @default.
- W3200215546 hasConcept C158457848 @default.
- W3200215546 hasConcept C159985019 @default.
- W3200215546 hasConcept C171250308 @default.
- W3200215546 hasConcept C17525397 @default.
- W3200215546 hasConcept C185592680 @default.
- W3200215546 hasConcept C187921700 @default.
- W3200215546 hasConcept C192562407 @default.
- W3200215546 hasConcept C196806460 @default.
- W3200215546 hasConcept C207521374 @default.
- W3200215546 hasConcept C26771246 @default.
- W3200215546 hasConcept C28413391 @default.
- W3200215546 hasConcept C30066665 @default.
- W3200215546 hasConcept C36628996 @default.
- W3200215546 hasConcept C49040817 @default.
- W3200215546 hasConcept C544956773 @default.
- W3200215546 hasConcept C77017923 @default.
- W3200215546 hasConcept C99752389 @default.
- W3200215546 hasConceptScore W3200215546C113843644 @default.
- W3200215546 hasConceptScore W3200215546C120665830 @default.
- W3200215546 hasConceptScore W3200215546C121332964 @default.
- W3200215546 hasConceptScore W3200215546C147080431 @default.
- W3200215546 hasConceptScore W3200215546C147789679 @default.
- W3200215546 hasConceptScore W3200215546C158457848 @default.
- W3200215546 hasConceptScore W3200215546C159985019 @default.
- W3200215546 hasConceptScore W3200215546C171250308 @default.
- W3200215546 hasConceptScore W3200215546C17525397 @default.
- W3200215546 hasConceptScore W3200215546C185592680 @default.
- W3200215546 hasConceptScore W3200215546C187921700 @default.
- W3200215546 hasConceptScore W3200215546C192562407 @default.
- W3200215546 hasConceptScore W3200215546C196806460 @default.
- W3200215546 hasConceptScore W3200215546C207521374 @default.
- W3200215546 hasConceptScore W3200215546C26771246 @default.
- W3200215546 hasConceptScore W3200215546C28413391 @default.
- W3200215546 hasConceptScore W3200215546C30066665 @default.
- W3200215546 hasConceptScore W3200215546C36628996 @default.
- W3200215546 hasConceptScore W3200215546C49040817 @default.
- W3200215546 hasConceptScore W3200215546C544956773 @default.
- W3200215546 hasConceptScore W3200215546C77017923 @default.
- W3200215546 hasConceptScore W3200215546C99752389 @default.
- W3200215546 hasLocation W32002155461 @default.
- W3200215546 hasLocation W32002155462 @default.
- W3200215546 hasLocation W32002155463 @default.
- W3200215546 hasOpenAccess W3200215546 @default.
- W3200215546 hasPrimaryLocation W32002155461 @default.
- W3200215546 hasRelatedWork W1646861040 @default.
- W3200215546 hasRelatedWork W1890184888 @default.
- W3200215546 hasRelatedWork W1908896971 @default.
- W3200215546 hasRelatedWork W2024681763 @default.
- W3200215546 hasRelatedWork W2080563484 @default.
- W3200215546 hasRelatedWork W2575211708 @default.
- W3200215546 hasRelatedWork W2969987387 @default.
- W3200215546 hasRelatedWork W3200215546 @default.
- W3200215546 hasRelatedWork W4211108425 @default.
- W3200215546 hasRelatedWork W1656762938 @default.
- W3200215546 isParatext "false" @default.
- W3200215546 isRetracted "false" @default.
- W3200215546 magId "3200215546" @default.
- W3200215546 workType "article" @default.