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- W3200367051 abstract "The article describes the design and modeling of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but requires 16 amplifier channels rather than 8. The nanopositioner is ultra low profile with a thickness of 1 mm. Analytical modeling and finite-element-analysis accurately predict the experimental performance. The stage was conservatively driven with 33% of the maximum voltage, which resulted in an X and Y travel range of 6.22 μm and 5.27 μm respectively; a Z travel range of 26.5 μm; and a rotational motion of 600 μrad and 884 μrad about the X and Y axis respectively. The first resonance frequency occurs at 883 Hz in the Z axis. Experimental atomic force microscopy is performed using the proposed device as a sample scanner." @default.
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- W3200367051 date "2021-12-01" @default.
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- W3200367051 title "Five-axis bimorph monolithic nanopositioning stage: Design, modeling, and characterization" @default.
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- W3200367051 doi "https://doi.org/10.1016/j.sna.2021.113125" @default.
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