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• W3200524385 endingPage "2699" @default.
• W3200524385 startingPage "2690" @default.
• W3200524385 abstract "A circuit modeling approach for self-sustained capacitively coupled microwave plasmas is introduced and validated in this article. The model solves the particle balance equation using a novel circuit optimization scheme to calculate the plasma parameters like electron density, sheath thickness, and electron temperature for a given input power, operating frequency, gas type, and pressure. While the existing models capture the ohmic loss in the bulk plasma region, the proposed model also takes into account power required to sustain plasma which proves to be considerable for higher electron densities. The model is rigorously validated using experimental results from two cases—one resonant and one non-resonant—both with self-sustained microwave plasma. As the post-processing results, other discharge parameters like sheath and plasma voltages as well as plasma reduced field are calculated. The proposed modeling approach can substantially simplify design and analysis of capacitively coupled microwave plasmas." @default.
• W3200524385 created "2021-09-27" @default.
• W3200524385 creator A5007622653 @default.
• W3200524385 creator A5031497866 @default.
• W3200524385 date "2021-09-01" @default.
• W3200524385 modified "2023-10-18" @default.
• W3200524385 title "A Comprehensive Circuit Modeling Approach for Self-Sustained Capacitively Coupled Microwave Plasmas" @default.
• W3200524385 cites W1461054308 @default.
• W3200524385 cites W1603631555 @default.
• W3200524385 cites W1980323805 @default.
• W3200524385 cites W1983458939 @default.
• W3200524385 cites W1990137316 @default.
• W3200524385 cites W2005081555 @default.
• W3200524385 cites W2010303769 @default.
• W3200524385 cites W2011599120 @default.
• W3200524385 cites W2015067680 @default.
• W3200524385 cites W2019594291 @default.
• W3200524385 cites W2022715358 @default.
• W3200524385 cites W2047966721 @default.
• W3200524385 cites W2058149520 @default.
• W3200524385 cites W2064663331 @default.
• W3200524385 cites W2065321381 @default.
• W3200524385 cites W2068774051 @default.
• W3200524385 cites W2073892539 @default.
• W3200524385 cites W2099725522 @default.
• W3200524385 cites W2107584724 @default.
• W3200524385 cites W2124381594 @default.
• W3200524385 cites W2130860281 @default.
• W3200524385 cites W2159638741 @default.
• W3200524385 cites W2160773202 @default.
• W3200524385 cites W2489828545 @default.
• W3200524385 cites W2493880907 @default.
• W3200524385 cites W2554697213 @default.
• W3200524385 cites W2622459159 @default.
• W3200524385 cites W2797083043 @default.
• W3200524385 cites W2804937730 @default.
• W3200524385 cites W2887934446 @default.
• W3200524385 cites W2892248505 @default.
• W3200524385 cites W2900082763 @default.
• W3200524385 cites W2912169567 @default.
• W3200524385 cites W2955995153 @default.
• W3200524385 cites W3000265324 @default.
• W3200524385 cites W3024205958 @default.
• W3200524385 cites W3097016520 @default.
• W3200524385 cites W4237060936 @default.
• W3200524385 cites W4245104830 @default.
• W3200524385 doi "https://doi.org/10.1109/tps.2021.3105642" @default.
• W3200524385 hasPublicationYear "2021" @default.
• W3200524385 type Work @default.
• W3200524385 sameAs 3200524385 @default.
• W3200524385 citedByCount "2" @default.
• W3200524385 countsByYear W32005243852022 @default.
• W3200524385 countsByYear W32005243852023 @default.
• W3200524385 crossrefType "journal-article" @default.
• W3200524385 hasAuthorship W3200524385A5007622653 @default.
• W3200524385 hasAuthorship W3200524385A5031497866 @default.
• W3200524385 hasConcept C121332964 @default.
• W3200524385 hasConcept C138230450 @default.
• W3200524385 hasConcept C165801399 @default.
• W3200524385 hasConcept C17525397 @default.
• W3200524385 hasConcept C184779094 @default.
• W3200524385 hasConcept C192039680 @default.
• W3200524385 hasConcept C192562407 @default.
• W3200524385 hasConcept C22175881 @default.
• W3200524385 hasConcept C23572009 @default.
• W3200524385 hasConcept C30475298 @default.
• W3200524385 hasConcept C44838205 @default.
• W3200524385 hasConcept C62520636 @default.
• W3200524385 hasConcept C68687820 @default.
• W3200524385 hasConcept C82706917 @default.
• W3200524385 hasConcept C95974651 @default.
• W3200524385 hasConceptScore W3200524385C121332964 @default.
• W3200524385 hasConceptScore W3200524385C138230450 @default.
• W3200524385 hasConceptScore W3200524385C165801399 @default.
• W3200524385 hasConceptScore W3200524385C17525397 @default.
• W3200524385 hasConceptScore W3200524385C184779094 @default.
• W3200524385 hasConceptScore W3200524385C192039680 @default.
• W3200524385 hasConceptScore W3200524385C192562407 @default.
• W3200524385 hasConceptScore W3200524385C22175881 @default.
• W3200524385 hasConceptScore W3200524385C23572009 @default.
• W3200524385 hasConceptScore W3200524385C30475298 @default.
• W3200524385 hasConceptScore W3200524385C44838205 @default.
• W3200524385 hasConceptScore W3200524385C62520636 @default.
• W3200524385 hasConceptScore W3200524385C68687820 @default.
• W3200524385 hasConceptScore W3200524385C82706917 @default.
• W3200524385 hasConceptScore W3200524385C95974651 @default.
• W3200524385 hasFunder F4320337345 @default.
• W3200524385 hasIssue "9" @default.
• W3200524385 hasLocation W32005243851 @default.
• W3200524385 hasOpenAccess W3200524385 @default.
• W3200524385 hasPrimaryLocation W32005243851 @default.
• W3200524385 hasRelatedWork W1966441875 @default.
• W3200524385 hasRelatedWork W2087255842 @default.
• W3200524385 hasRelatedWork W2091839678 @default.
• W3200524385 hasRelatedWork W2106656305 @default.
• W3200524385 hasRelatedWork W2330478120 @default.
• W3200524385 hasRelatedWork W2790125938 @default.
• W3200524385 hasRelatedWork W2900091209 @default.

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