Matches in SemOpenAlex for { <https://semopenalex.org/work/W3200721520> ?p ?o ?g. }
- W3200721520 endingPage "138923" @default.
- W3200721520 startingPage "138923" @default.
- W3200721520 abstract "We have investigated the effects of silicon (Si) doping on the chemical bonding states and the electrical, optical, and mechanical properties of nitrogen-doped diamond-like carbon (N−DLC) films prepared via plasma-enhanced chemical vapor deposition using hydrogen as a dilution gas. N doping accelerated the formation of clustered sp2 C in N−DLC films, whereas the clustering was almost suppressed in Si and N doped DLC (Si−N−DLC) films. Sp3 C sites in the Si–N–DLC films were higher than those in the N–DLC films. For the Si−N−DLC films, sp3 C-N bonds were preferentially formed compared with the sp2 C=N bonds. The internal stress on the Si−N−DLC films was lower than that on the N−DLC films. The Si−N−DLC films exhibited higher optical bandgaps than the N−DLC films. As the N2 flow ratio increased, the optical bandgap of the Si−N−DLC films showed an increasing trend, whereas that of the N−DLC films showed an opposite trend. The current−voltage characteristics of Si−N−DLC/p-type Si heterojunctions were not rectifying; however, after postdeposition annealing, the heterojunctions exhibited rectifying characteristics." @default.
- W3200721520 created "2021-09-27" @default.
- W3200721520 creator A5005304160 @default.
- W3200721520 creator A5008078597 @default.
- W3200721520 creator A5008787833 @default.
- W3200721520 creator A5037448737 @default.
- W3200721520 creator A5059195813 @default.
- W3200721520 creator A5065184409 @default.
- W3200721520 creator A5067279338 @default.
- W3200721520 date "2021-10-01" @default.
- W3200721520 modified "2023-10-17" @default.
- W3200721520 title "Effects of silicon doping on the chemical bonding states and properties of nitrogen-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition" @default.
- W3200721520 cites W1966612453 @default.
- W3200721520 cites W1967242874 @default.
- W3200721520 cites W1970533496 @default.
- W3200721520 cites W1970608177 @default.
- W3200721520 cites W1974428429 @default.
- W3200721520 cites W1976912580 @default.
- W3200721520 cites W1980997151 @default.
- W3200721520 cites W1981050036 @default.
- W3200721520 cites W1985204970 @default.
- W3200721520 cites W1987407088 @default.
- W3200721520 cites W1988133629 @default.
- W3200721520 cites W1996582551 @default.
- W3200721520 cites W1996791560 @default.
- W3200721520 cites W1998508788 @default.
- W3200721520 cites W2001214461 @default.
- W3200721520 cites W2001331878 @default.
- W3200721520 cites W2003660576 @default.
- W3200721520 cites W2003881765 @default.
- W3200721520 cites W2004539706 @default.
- W3200721520 cites W2008746189 @default.
- W3200721520 cites W2008885699 @default.
- W3200721520 cites W2010741662 @default.
- W3200721520 cites W2017233493 @default.
- W3200721520 cites W2018343333 @default.
- W3200721520 cites W2018544124 @default.
- W3200721520 cites W2020505007 @default.
- W3200721520 cites W2023940050 @default.
- W3200721520 cites W2024764666 @default.
- W3200721520 cites W2037162059 @default.
- W3200721520 cites W2040738278 @default.
- W3200721520 cites W2040875144 @default.
- W3200721520 cites W2041301890 @default.
- W3200721520 cites W2044522103 @default.
- W3200721520 cites W2045171985 @default.
- W3200721520 cites W2047556163 @default.
- W3200721520 cites W2049571923 @default.
- W3200721520 cites W2054175371 @default.
- W3200721520 cites W2054466016 @default.
- W3200721520 cites W2055830698 @default.
- W3200721520 cites W2058130011 @default.
- W3200721520 cites W2058635889 @default.
- W3200721520 cites W2059708371 @default.
- W3200721520 cites W2061486574 @default.
- W3200721520 cites W2063288783 @default.
- W3200721520 cites W2063966916 @default.
- W3200721520 cites W2066874036 @default.
- W3200721520 cites W2070048544 @default.
- W3200721520 cites W2072679245 @default.
- W3200721520 cites W2073380831 @default.
- W3200721520 cites W2073861779 @default.
- W3200721520 cites W2074375448 @default.
- W3200721520 cites W2078627593 @default.
- W3200721520 cites W2084075657 @default.
- W3200721520 cites W2087753690 @default.
- W3200721520 cites W2089973178 @default.
- W3200721520 cites W2090488144 @default.
- W3200721520 cites W2108189836 @default.
- W3200721520 cites W2131047963 @default.
- W3200721520 cites W2135131602 @default.
- W3200721520 cites W2138265279 @default.
- W3200721520 cites W2140707201 @default.
- W3200721520 cites W2144543901 @default.
- W3200721520 cites W2171834497 @default.
- W3200721520 cites W2235679284 @default.
- W3200721520 cites W2343971619 @default.
- W3200721520 cites W2400491704 @default.
- W3200721520 cites W2619908284 @default.
- W3200721520 cites W2741134244 @default.
- W3200721520 cites W2546178112 @default.
- W3200721520 doi "https://doi.org/10.1016/j.tsf.2021.138923" @default.
- W3200721520 hasPublicationYear "2021" @default.
- W3200721520 type Work @default.
- W3200721520 sameAs 3200721520 @default.
- W3200721520 citedByCount "7" @default.
- W3200721520 countsByYear W32007215202022 @default.
- W3200721520 countsByYear W32007215202023 @default.
- W3200721520 crossrefType "journal-article" @default.
- W3200721520 hasAuthorship W3200721520A5005304160 @default.
- W3200721520 hasAuthorship W3200721520A5008078597 @default.
- W3200721520 hasAuthorship W3200721520A5008787833 @default.
- W3200721520 hasAuthorship W3200721520A5037448737 @default.
- W3200721520 hasAuthorship W3200721520A5059195813 @default.
- W3200721520 hasAuthorship W3200721520A5065184409 @default.
- W3200721520 hasAuthorship W3200721520A5067279338 @default.
- W3200721520 hasBestOaLocation W32007215201 @default.
- W3200721520 hasConcept C104779481 @default.