Matches in SemOpenAlex for { <https://semopenalex.org/work/W3201611544> ?p ?o ?g. }
- W3201611544 endingPage "138915" @default.
- W3201611544 startingPage "138915" @default.
- W3201611544 abstract "In this work, aluminum nitride (AlN) layers were grown on sapphire substrate with different times and temperatures of nitridation through metal organics chemical vapor deposition growth technique. Besides, during the growth process, trimethylaluminum (TMAl) preflow was introduced, in particular, after the nucleation. From x-ray diffraction measurement in (002) and (102) reflections, it was found that an average threading dislocation density (TDD) for the AlN layer without nitridation was around 1.07 × 109 cm−2. By applying the nitridation for 20 minutes at 850 ºC, the average TDD in the corresponding AlN layer reduced down to ∼9.33 × 108 cm−2. Moreover, the layer exhibited a smoother surface, as observed from atomic force microscopy measurement. Overall, the results from this work suggested that a proper time and temperature of nitridation with the introduction of TMAl preflow could be a promising alternative for obtaining a high quality AlN layer." @default.
- W3201611544 created "2021-09-27" @default.
- W3201611544 creator A5015447223 @default.
- W3201611544 creator A5024758865 @default.
- W3201611544 creator A5025447959 @default.
- W3201611544 creator A5058156953 @default.
- W3201611544 creator A5084291587 @default.
- W3201611544 creator A5085139315 @default.
- W3201611544 date "2021-10-01" @default.
- W3201611544 modified "2023-09-23" @default.
- W3201611544 title "High quality aluminum nitride layer grown with a combined step of nitridation and trimethylaluminum preflow" @default.
- W3201611544 cites W1977566651 @default.
- W3201611544 cites W1977861029 @default.
- W3201611544 cites W1984558938 @default.
- W3201611544 cites W2033747201 @default.
- W3201611544 cites W2035879019 @default.
- W3201611544 cites W2328967395 @default.
- W3201611544 cites W2345615585 @default.
- W3201611544 cites W2528787733 @default.
- W3201611544 cites W2554033907 @default.
- W3201611544 cites W2589462217 @default.
- W3201611544 cites W2613946320 @default.
- W3201611544 cites W2615488829 @default.
- W3201611544 cites W2740094999 @default.
- W3201611544 cites W2760526466 @default.
- W3201611544 cites W2765891330 @default.
- W3201611544 cites W2769740227 @default.
- W3201611544 cites W2783623914 @default.
- W3201611544 cites W2791713817 @default.
- W3201611544 cites W2900684036 @default.
- W3201611544 cites W2923831016 @default.
- W3201611544 cites W2937259254 @default.
- W3201611544 cites W2956007404 @default.
- W3201611544 cites W2975898826 @default.
- W3201611544 cites W2977826063 @default.
- W3201611544 cites W2989799958 @default.
- W3201611544 doi "https://doi.org/10.1016/j.tsf.2021.138915" @default.
- W3201611544 hasPublicationYear "2021" @default.
- W3201611544 type Work @default.
- W3201611544 sameAs 3201611544 @default.
- W3201611544 citedByCount "2" @default.
- W3201611544 countsByYear W32016115442022 @default.
- W3201611544 countsByYear W32016115442023 @default.
- W3201611544 crossrefType "journal-article" @default.
- W3201611544 hasAuthorship W3201611544A5015447223 @default.
- W3201611544 hasAuthorship W3201611544A5024758865 @default.
- W3201611544 hasAuthorship W3201611544A5025447959 @default.
- W3201611544 hasAuthorship W3201611544A5058156953 @default.
- W3201611544 hasAuthorship W3201611544A5084291587 @default.
- W3201611544 hasAuthorship W3201611544A5085139315 @default.
- W3201611544 hasConcept C111368507 @default.
- W3201611544 hasConcept C113196181 @default.
- W3201611544 hasConcept C120665830 @default.
- W3201611544 hasConcept C121332964 @default.
- W3201611544 hasConcept C127313418 @default.
- W3201611544 hasConcept C127413603 @default.
- W3201611544 hasConcept C13862629 @default.
- W3201611544 hasConcept C159122135 @default.
- W3201611544 hasConcept C159985019 @default.
- W3201611544 hasConcept C171250308 @default.
- W3201611544 hasConcept C178790620 @default.
- W3201611544 hasConcept C185592680 @default.
- W3201611544 hasConcept C192562407 @default.
- W3201611544 hasConcept C194760766 @default.
- W3201611544 hasConcept C2777289219 @default.
- W3201611544 hasConcept C2779227376 @default.
- W3201611544 hasConcept C2780064504 @default.
- W3201611544 hasConcept C2780162792 @default.
- W3201611544 hasConcept C42360764 @default.
- W3201611544 hasConcept C43617362 @default.
- W3201611544 hasConcept C49040817 @default.
- W3201611544 hasConcept C513153333 @default.
- W3201611544 hasConcept C520434653 @default.
- W3201611544 hasConcept C57410435 @default.
- W3201611544 hasConcept C61048295 @default.
- W3201611544 hasConceptScore W3201611544C111368507 @default.
- W3201611544 hasConceptScore W3201611544C113196181 @default.
- W3201611544 hasConceptScore W3201611544C120665830 @default.
- W3201611544 hasConceptScore W3201611544C121332964 @default.
- W3201611544 hasConceptScore W3201611544C127313418 @default.
- W3201611544 hasConceptScore W3201611544C127413603 @default.
- W3201611544 hasConceptScore W3201611544C13862629 @default.
- W3201611544 hasConceptScore W3201611544C159122135 @default.
- W3201611544 hasConceptScore W3201611544C159985019 @default.
- W3201611544 hasConceptScore W3201611544C171250308 @default.
- W3201611544 hasConceptScore W3201611544C178790620 @default.
- W3201611544 hasConceptScore W3201611544C185592680 @default.
- W3201611544 hasConceptScore W3201611544C192562407 @default.
- W3201611544 hasConceptScore W3201611544C194760766 @default.
- W3201611544 hasConceptScore W3201611544C2777289219 @default.
- W3201611544 hasConceptScore W3201611544C2779227376 @default.
- W3201611544 hasConceptScore W3201611544C2780064504 @default.
- W3201611544 hasConceptScore W3201611544C2780162792 @default.
- W3201611544 hasConceptScore W3201611544C42360764 @default.
- W3201611544 hasConceptScore W3201611544C43617362 @default.
- W3201611544 hasConceptScore W3201611544C49040817 @default.
- W3201611544 hasConceptScore W3201611544C513153333 @default.
- W3201611544 hasConceptScore W3201611544C520434653 @default.