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• W3201980644 abstract "In this letter, a design technique is presented to reduce the cross-axis sensitivity (CAS) in single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A design technique based on resonant mode ordering concerning drive-displacement amplitudes ratio and frequency differences ratio was proposed. A simplified single-drive multi-axis MEMS gyroscope, based on the mode-split approach, was analyzed for cross-axis sensitivity. The designed gyroscope utilizing a driving scheme based on a simple folded coupling spring has equal x and y – axes drive-displacement amplitudes of 3.892 μ m respectively. The proposed resonant mode ordering technique was used, and an equal sense-frequency difference of 184 Hz was achieved with respect to drive-mode frequency. The designed gyroscope having common resonant mode order was analyzed, and CAS of x and y – axes was computed to be 0.241% and 0.387% respectively. The proposed resonant mode order technique successfully reduced the cross-axis sensitivity in the designed gyroscope. The reduced cross-axis sensitivities of x and y – axes were 0.025% and 0.076% respectively. Comparison of both designs showed a reduced rate of 89.627% and 80.362% in x and y – axes respectively. The main sensitivities of x and y – axes were computed to be 0.055 nm/dps respectively. Furthermore, the significance of the proposed technique was experimentally verified. • A design technique was presented to reduce cross-axis sensitivity in single-drive, multi-axis MEMS gyroscope. • Resonant mode order concerning drive-displacement amplitudes ratio and sense frequency differences ratio was proposed. • Cross-axis sensitivity was successfully reduced, showed a reduced rate of 89.627% and 80.362% in x and y – axes respectively. • Furthermore, the significance of the proposed technique was experimentally verified." @default.
• W3201980644 created "2021-10-11" @default.
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• W3201980644 date "2021-12-01" @default.
• W3201980644 modified "2023-10-09" @default.
• W3201980644 title "Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity" @default.
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• W3201980644 doi "https://doi.org/10.1016/j.sna.2021.113145" @default.
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