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• W3203777629 endingPage "125" @default.
• W3203777629 startingPage "120" @default.
• W3203777629 abstract "MEMS-based micro-electro-discharge machining (M3EDM) is a batch microfabrication technique that utilizes planar-electrode actuators fabricated directly on the work material. Electrostatically driving the electrode-actuator device, previously enabled with copper-based designs, using an applied EDM voltage enables micromachining of electrode patterns into any electrically conductive material. This paper presents an alternative device based on nickel with its higher thermomechanical resistance, aiming to achieve greater uniformity and stability of the process toward its application to micromanufacturing. The developed nickel-based device and its M3EDM process is used to pattern cantilever-like MEMS contact switches as a preliminary application test, demonstrating the process with the intended effects. The outcome is analyzed to suggest a need for improvement, which is addressed through a modified approach to the M3EDM fabrication of application devices showing a promising result. The study encourages further optimizations of the technology, which are evaluated and discussed as well." @default.
• W3203777629 created "2021-10-11" @default.
• W3203777629 creator A5038781050 @default.
• W3203777629 creator A5040249526 @default.
• W3203777629 date "2021-09-15" @default.
• W3203777629 modified "2023-09-24" @default.
• W3203777629 title "A Study of MEMS-Based Micro-Electro-Discharge Machining and Application to Micromanufacturing" @default.
• W3203777629 cites W1971870134 @default.
• W3203777629 cites W1982254422 @default.
• W3203777629 cites W1984902117 @default.
• W3203777629 cites W1998072040 @default.
• W3203777629 cites W2015580138 @default.
• W3203777629 cites W2028258918 @default.
• W3203777629 cites W2029457564 @default.
• W3203777629 cites W2030960849 @default.
• W3203777629 cites W2058277307 @default.
• W3203777629 cites W2060985839 @default.
• W3203777629 cites W2070140040 @default.
• W3203777629 cites W2077759588 @default.
• W3203777629 cites W2125950824 @default.
• W3203777629 cites W2137268994 @default.
• W3203777629 cites W2153732143 @default.
• W3203777629 cites W2157246609 @default.
• W3203777629 cites W2162634804 @default.
• W3203777629 cites W636847917 @default.
• W3203777629 hasPublicationYear "2021" @default.
• W3203777629 type Work @default.
• W3203777629 sameAs 3203777629 @default.
• W3203777629 citedByCount "0" @default.
• W3203777629 crossrefType "journal-article" @default.
• W3203777629 hasAuthorship W3203777629A5038781050 @default.
• W3203777629 hasAuthorship W3203777629A5040249526 @default.
• W3203777629 hasConcept C111919701 @default.
• W3203777629 hasConcept C119599485 @default.
• W3203777629 hasConcept C127413603 @default.
• W3203777629 hasConcept C136525101 @default.
• W3203777629 hasConcept C140075996 @default.
• W3203777629 hasConcept C141354745 @default.
• W3203777629 hasConcept C142724271 @default.
• W3203777629 hasConcept C145667562 @default.
• W3203777629 hasConcept C147789679 @default.
• W3203777629 hasConcept C159985019 @default.
• W3203777629 hasConcept C165801399 @default.
• W3203777629 hasConcept C171250308 @default.
• W3203777629 hasConcept C172707124 @default.
• W3203777629 hasConcept C17525397 @default.
• W3203777629 hasConcept C185592680 @default.
• W3203777629 hasConcept C191897082 @default.
• W3203777629 hasConcept C192562407 @default.
• W3203777629 hasConcept C204787440 @default.
• W3203777629 hasConcept C24326235 @default.
• W3203777629 hasConcept C37977207 @default.
• W3203777629 hasConcept C41008148 @default.
• W3203777629 hasConcept C523214423 @default.
• W3203777629 hasConcept C527607 @default.
• W3203777629 hasConcept C71924100 @default.
• W3203777629 hasConcept C78519656 @default.
• W3203777629 hasConcept C98045186 @default.
• W3203777629 hasConceptScore W3203777629C111919701 @default.
• W3203777629 hasConceptScore W3203777629C119599485 @default.
• W3203777629 hasConceptScore W3203777629C127413603 @default.
• W3203777629 hasConceptScore W3203777629C136525101 @default.
• W3203777629 hasConceptScore W3203777629C140075996 @default.
• W3203777629 hasConceptScore W3203777629C141354745 @default.
• W3203777629 hasConceptScore W3203777629C142724271 @default.
• W3203777629 hasConceptScore W3203777629C145667562 @default.
• W3203777629 hasConceptScore W3203777629C147789679 @default.
• W3203777629 hasConceptScore W3203777629C159985019 @default.
• W3203777629 hasConceptScore W3203777629C165801399 @default.
• W3203777629 hasConceptScore W3203777629C171250308 @default.
• W3203777629 hasConceptScore W3203777629C172707124 @default.
• W3203777629 hasConceptScore W3203777629C17525397 @default.
• W3203777629 hasConceptScore W3203777629C185592680 @default.
• W3203777629 hasConceptScore W3203777629C191897082 @default.
• W3203777629 hasConceptScore W3203777629C192562407 @default.
• W3203777629 hasConceptScore W3203777629C204787440 @default.
• W3203777629 hasConceptScore W3203777629C24326235 @default.
• W3203777629 hasConceptScore W3203777629C37977207 @default.
• W3203777629 hasConceptScore W3203777629C41008148 @default.
• W3203777629 hasConceptScore W3203777629C523214423 @default.
• W3203777629 hasConceptScore W3203777629C527607 @default.
• W3203777629 hasConceptScore W3203777629C71924100 @default.
• W3203777629 hasConceptScore W3203777629C78519656 @default.
• W3203777629 hasConceptScore W3203777629C98045186 @default.
• W3203777629 hasLocation W32037776291 @default.
• W3203777629 hasOpenAccess W3203777629 @default.
• W3203777629 hasPrimaryLocation W32037776291 @default.
• W3203777629 hasRelatedWork W194413345 @default.
• W3203777629 hasRelatedWork W2055871820 @default.
• W3203777629 hasRelatedWork W2065636624 @default.
• W3203777629 hasRelatedWork W2134484220 @default.
• W3203777629 hasRelatedWork W2184618938 @default.
• W3203777629 hasRelatedWork W2276389091 @default.
• W3203777629 hasRelatedWork W233240900 @default.
• W3203777629 hasRelatedWork W2349295470 @default.
• W3203777629 hasRelatedWork W2377335783 @default.
• W3203777629 hasRelatedWork W2563384374 @default.
• W3203777629 hasRelatedWork W2735014613 @default.

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