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- W3203920611 abstract "Micro-electro-mechanical devices have been used for sensing applications in its application in various field such as drug discovery, disease diagnosis, detection and characterization of materials, detection of fluid flow parameters, etc. With these devices, sensing is commonly achieved via detection in change of stress/strain/mass with beam static deflection/frequency. In the present study, the behavior of a micro-electro-mechanical (MEM) flow sensor under electrostatic as well as external mechanical loading due to cross-flow of non-viscous fluid is modeled. Hamiltons principle is used to derive the governing partial differential equations for the flow sensor. Numerical solution of the governing equations is obtained with MATLAB code via finite difference method. The numerical results were very comparable to that of analytical solution obtained with MATHEMATICA. The model is studied with respect the basic controllable parameters of the flow sensor such as voltage input, initial gap, and maximum flow velocity. The results show that nonlinear relationship exists between the velocity of the moving fluid and the pull-in voltage of cantilever beam. The voltage-flow characteristics curves were obtained such that the flow velocity at any given voltage could be determined. Hence, the model provides a useful insight on to the performance of a controllable micro-electro cantilever beam flow sensor." @default.
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- W3203920611 date "2021-01-01" @default.
- W3203920611 modified "2023-10-04" @default.
- W3203920611 title "NONLINEAR ANAYSIS OF MEMS UNDER MECHANICAL AND ELECTROSTATIC LOADING" @default.
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