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- W3204152833 abstract "This PhD thesis reports the design, modeling, simulation, fabrication andcharacterization of a novel CMOS-MEMS magnetic field sensor (main device). Thissensor consists of two major components, 1) resonating shuttle and 2) set of torsionalcoils. Each component works as magnetic sensor itself. The linear response of thesedevices to a wide range of magnetic fields make them suitable for applications whereweak fields require to be measured with high resolution. The working of the mainCMOS-MEMS resonant magnetic sensor is based on a shift in resonant frequency ofthe shuttle in the presence of magnetic field. The flexural beams of the shuttle aredesigned so that axial forces from the side torsional coils are exerted on them whenexposed to the magnetic field. The axial forces causes a positive shift in the resonancefrequency of the shuttle. The operation of the resonating shuttle based sensor is basedon the differential change in the amplitude of the shuttle and this differential change issensed by optical sensing method." @default.
- W3204152833 created "2021-10-11" @default.
- W3204152833 creator A5091801251 @default.
- W3204152833 date "2015-05-01" @default.
- W3204152833 modified "2023-09-23" @default.
- W3204152833 title "DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMSSTATIC TO LOW FREQUENCY MAGNETIC FIELD SENSOR" @default.
- W3204152833 hasPublicationYear "2015" @default.
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